JPS55130807A - Manufacture of silicon nytride powder - Google Patents

Manufacture of silicon nytride powder

Info

Publication number
JPS55130807A
JPS55130807A JP4335880A JP4335880A JPS55130807A JP S55130807 A JPS55130807 A JP S55130807A JP 4335880 A JP4335880 A JP 4335880A JP 4335880 A JP4335880 A JP 4335880A JP S55130807 A JPS55130807 A JP S55130807A
Authority
JP
Japan
Prior art keywords
powder
nytride
silicon
manufacture
nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4335880A
Other languages
Japanese (ja)
Other versions
JPS578047B2 (en
Inventor
Kazumichi Kijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Research in Inorganic Material
Original Assignee
National Institute for Research in Inorganic Material
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute for Research in Inorganic Material filed Critical National Institute for Research in Inorganic Material
Priority to JP4335880A priority Critical patent/JPS55130807A/en
Publication of JPS55130807A publication Critical patent/JPS55130807A/en
Publication of JPS578047B2 publication Critical patent/JPS578047B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)

Abstract

PURPOSE: To produce silicon nitride powder not containing chloride impurity, by a method wherein a hydrogen silicide and a nitrogen hydride are reacted in a gas phase and in an inert or reducing atmosphere under a fluidized condition.
CONSTITUTION: A hydrogen silicide and a nitrogen hydride in a molar ratio of silicon to nitrogen of 10W0.01 are reacted in a gas phase and in an inert or reducing atmosphere under 9 fluidized condition at 1,550W1,900°C to produce silicon nitride powder. Examples of hydrogen silicides are SiH4, Si2H6, Si3H8, and Si4H10, and a nitrogen hydride is illustrated by NH3, N2H4, and HN3.
COPYRIGHT: (C)1980,JPO&Japio
JP4335880A 1980-04-02 1980-04-02 Manufacture of silicon nytride powder Granted JPS55130807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4335880A JPS55130807A (en) 1980-04-02 1980-04-02 Manufacture of silicon nytride powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4335880A JPS55130807A (en) 1980-04-02 1980-04-02 Manufacture of silicon nytride powder

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP4602177A Division JPS53130300A (en) 1977-04-20 1977-04-20 Method of synthesizing silicon nitride or silicon imide

Publications (2)

Publication Number Publication Date
JPS55130807A true JPS55130807A (en) 1980-10-11
JPS578047B2 JPS578047B2 (en) 1982-02-15

Family

ID=12661622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4335880A Granted JPS55130807A (en) 1980-04-02 1980-04-02 Manufacture of silicon nytride powder

Country Status (1)

Country Link
JP (1) JPS55130807A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4929432A (en) * 1988-10-19 1990-05-29 Union Carbide Corporation Process for producing crystalline silicon nitride powder
US4935214A (en) * 1987-09-15 1990-06-19 United States Department Of Energy Process for producing high purity silicon nitride by the direct reaction between elemental silicon and nitrogen-hydrogen liquid reactants
CN108285132A (en) * 2018-04-19 2018-07-17 苏州协鑫能源技术发展有限公司 The preparation method of silicon nitride

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118409A (en) * 1977-03-25 1978-10-16 Tokyo Shibaura Electric Co Method of manufacturing heat resistant material

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118409A (en) * 1977-03-25 1978-10-16 Tokyo Shibaura Electric Co Method of manufacturing heat resistant material

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4935214A (en) * 1987-09-15 1990-06-19 United States Department Of Energy Process for producing high purity silicon nitride by the direct reaction between elemental silicon and nitrogen-hydrogen liquid reactants
US4929432A (en) * 1988-10-19 1990-05-29 Union Carbide Corporation Process for producing crystalline silicon nitride powder
CN108285132A (en) * 2018-04-19 2018-07-17 苏州协鑫能源技术发展有限公司 The preparation method of silicon nitride
CN108285132B (en) * 2018-04-19 2019-11-15 苏州协鑫能源技术发展有限公司 The preparation method of silicon nitride

Also Published As

Publication number Publication date
JPS578047B2 (en) 1982-02-15

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