JPS557693B2 - - Google Patents
Info
- Publication number
- JPS557693B2 JPS557693B2 JP5956175A JP5956175A JPS557693B2 JP S557693 B2 JPS557693 B2 JP S557693B2 JP 5956175 A JP5956175 A JP 5956175A JP 5956175 A JP5956175 A JP 5956175A JP S557693 B2 JPS557693 B2 JP S557693B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5956175A JPS51136286A (en) | 1975-05-21 | 1975-05-21 | Ion implantation using noncrystalline carchogenide thin film as mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5956175A JPS51136286A (en) | 1975-05-21 | 1975-05-21 | Ion implantation using noncrystalline carchogenide thin film as mask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51136286A JPS51136286A (en) | 1976-11-25 |
| JPS557693B2 true JPS557693B2 (Direct) | 1980-02-27 |
Family
ID=13116769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5956175A Granted JPS51136286A (en) | 1975-05-21 | 1975-05-21 | Ion implantation using noncrystalline carchogenide thin film as mask |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51136286A (Direct) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0215903A (ja) * | 1988-07-01 | 1990-01-19 | Matsushita Electric Ind Co Ltd | 工作機 |
| JPH0253505A (ja) * | 1988-08-17 | 1990-02-22 | Matsushita Electric Ind Co Ltd | 工作機 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5355370U (Direct) * | 1976-10-08 | 1978-05-12 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5139121B2 (Direct) * | 1971-10-11 | 1976-10-26 | ||
| JPS529505B2 (Direct) * | 1972-06-28 | 1977-03-16 |
-
1975
- 1975-05-21 JP JP5956175A patent/JPS51136286A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0215903A (ja) * | 1988-07-01 | 1990-01-19 | Matsushita Electric Ind Co Ltd | 工作機 |
| JPH0253505A (ja) * | 1988-08-17 | 1990-02-22 | Matsushita Electric Ind Co Ltd | 工作機 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51136286A (en) | 1976-11-25 |