JPS557693B2 - - Google Patents

Info

Publication number
JPS557693B2
JPS557693B2 JP5956175A JP5956175A JPS557693B2 JP S557693 B2 JPS557693 B2 JP S557693B2 JP 5956175 A JP5956175 A JP 5956175A JP 5956175 A JP5956175 A JP 5956175A JP S557693 B2 JPS557693 B2 JP S557693B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5956175A
Other languages
Japanese (ja)
Other versions
JPS51136286A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5956175A priority Critical patent/JPS51136286A/ja
Publication of JPS51136286A publication Critical patent/JPS51136286A/ja
Publication of JPS557693B2 publication Critical patent/JPS557693B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP5956175A 1975-05-21 1975-05-21 Ion implantation using noncrystalline carchogenide thin film as mask Granted JPS51136286A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5956175A JPS51136286A (en) 1975-05-21 1975-05-21 Ion implantation using noncrystalline carchogenide thin film as mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5956175A JPS51136286A (en) 1975-05-21 1975-05-21 Ion implantation using noncrystalline carchogenide thin film as mask

Publications (2)

Publication Number Publication Date
JPS51136286A JPS51136286A (en) 1976-11-25
JPS557693B2 true JPS557693B2 (Direct) 1980-02-27

Family

ID=13116769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5956175A Granted JPS51136286A (en) 1975-05-21 1975-05-21 Ion implantation using noncrystalline carchogenide thin film as mask

Country Status (1)

Country Link
JP (1) JPS51136286A (Direct)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0215903A (ja) * 1988-07-01 1990-01-19 Matsushita Electric Ind Co Ltd 工作機
JPH0253505A (ja) * 1988-08-17 1990-02-22 Matsushita Electric Ind Co Ltd 工作機

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5355370U (Direct) * 1976-10-08 1978-05-12

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5139121B2 (Direct) * 1971-10-11 1976-10-26
JPS529505B2 (Direct) * 1972-06-28 1977-03-16

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0215903A (ja) * 1988-07-01 1990-01-19 Matsushita Electric Ind Co Ltd 工作機
JPH0253505A (ja) * 1988-08-17 1990-02-22 Matsushita Electric Ind Co Ltd 工作機

Also Published As

Publication number Publication date
JPS51136286A (en) 1976-11-25

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