JPS5571039A - Evaluating method for corrosion of interconnected layer in airtight electronic part - Google Patents

Abstract

PURPOSE: To detect and evaluate corrosion of an interconnected layer simply at a short time by a method wherein the gas in a sealed zone is extracted through breaking the sealed zone for an electronic part in vacuum, presence and content of hydrogen are detected and then corrosion of the interconnected layer is evaluated.

CONSTITUTION: An electronic part 3 is placed on a sample rest 2 in a chamber 1, and after closing the door the chamber 1 is vacuumized internally. Whenever a desired degree of vacuum is obtained, the current is stopped from being carried to an electromagnet 13 to drop a plumb 12 onto the part 3, a hole is perforated in a cap 7, and the plumb 12 is drawn upward in the chamber 1. The gas in the sealed zone 10 of the part 3 is then diffused in the chamber 1. The gas thus diffused in the chamber is examined for content of hydrogen and if contained, density (quantity) of the hydrogen is detected. Where there is found hydrogen present therein, it is decided that the interconnected layer has a corrosion. Then density of hydrogen will be ensured when hydrogen can be detected, thereby evaluating a degree of corrosion.

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