JPS5568628A - Contactless vacuum seal - Google Patents

Contactless vacuum seal

Info

Publication number
JPS5568628A
JPS5568628A JP14162678A JP14162678A JPS5568628A JP S5568628 A JPS5568628 A JP S5568628A JP 14162678 A JP14162678 A JP 14162678A JP 14162678 A JP14162678 A JP 14162678A JP S5568628 A JPS5568628 A JP S5568628A
Authority
JP
Japan
Prior art keywords
shaft
peripheral surface
outer peripheral
hollow
high pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14162678A
Other languages
Japanese (ja)
Other versions
JPS572171B2 (en
Inventor
Tatsumi Suganuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14162678A priority Critical patent/JPS5568628A/en
Publication of JPS5568628A publication Critical patent/JPS5568628A/en
Publication of JPS572171B2 publication Critical patent/JPS572171B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To maintain a stable vacuum for a long period while eliminating the need for use of a sealing member by using a hollow rotary cylindrical shaft having a zig-zag uneveness on the outer peripheral surface of the shaft end in the longitudinal direction.
CONSTITUTION: A cylindrical body forming a hollow rotary shaft 10 has one end face to suck and hold a semiconductor wafer 1. The hollow shaft 10 has at the other end a zig-zag uneveness 9 on the outer peripheral surface in the longitudinal direction. The end of the shaft 10 is shaped in the nozzle form 9a and is inserted without contact, into a hole 13 of the support 12 having an inlet 11 of high pressure gas. When high pressure gas flows through the inlet 11 into the hole 13, a part of the gas flows out through the space between the rotary shaft 10 and the internal wall of the wall 13. Because the flowing gas stays between the wide space between the depressions and elevations of the unevenss part 9, the space between the shaft 10 and the hole 13 is completely sealed. At the same time, the high pressure gas jetting out through the outer peripheral surface of the nozzle 9a causes the hollow part 10a of the shaft 10 to decrease in pressure.
COPYRIGHT: (C)1980,JPO&Japio
JP14162678A 1978-11-16 1978-11-16 Contactless vacuum seal Granted JPS5568628A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14162678A JPS5568628A (en) 1978-11-16 1978-11-16 Contactless vacuum seal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14162678A JPS5568628A (en) 1978-11-16 1978-11-16 Contactless vacuum seal

Publications (2)

Publication Number Publication Date
JPS5568628A true JPS5568628A (en) 1980-05-23
JPS572171B2 JPS572171B2 (en) 1982-01-14

Family

ID=15296406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14162678A Granted JPS5568628A (en) 1978-11-16 1978-11-16 Contactless vacuum seal

Country Status (1)

Country Link
JP (1) JPS5568628A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5713506A (en) * 1995-12-14 1998-02-03 General Electric Company Vacuum holding rotary welding fixture

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60834A (en) * 1983-06-16 1985-01-05 山本　惣一 Hulling apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5713506A (en) * 1995-12-14 1998-02-03 General Electric Company Vacuum holding rotary welding fixture
US6000600A (en) * 1995-12-14 1999-12-14 General Electric Company Method for welding with a vacuum

Also Published As

Publication number Publication date
JPS572171B2 (en) 1982-01-14

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