JPS5563831A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5563831A JPS5563831A JP13825678A JP13825678A JPS5563831A JP S5563831 A JPS5563831 A JP S5563831A JP 13825678 A JP13825678 A JP 13825678A JP 13825678 A JP13825678 A JP 13825678A JP S5563831 A JPS5563831 A JP S5563831A
- Authority
- JP
- Japan
- Prior art keywords
- developed
- vapor
- developing
- contact
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13825678A JPS5563831A (en) | 1978-11-09 | 1978-11-09 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13825678A JPS5563831A (en) | 1978-11-09 | 1978-11-09 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5563831A true JPS5563831A (en) | 1980-05-14 |
Family
ID=15217690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13825678A Pending JPS5563831A (en) | 1978-11-09 | 1978-11-09 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5563831A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006095399A1 (ja) * | 2005-03-07 | 2006-09-14 | Fujitsu Limited | フォトリソグラフィ方法 |
-
1978
- 1978-11-09 JP JP13825678A patent/JPS5563831A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006095399A1 (ja) * | 2005-03-07 | 2006-09-14 | Fujitsu Limited | フォトリソグラフィ方法 |
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