JPS54159869A - High-voltage heat treatment unit - Google Patents
High-voltage heat treatment unitInfo
- Publication number
- JPS54159869A JPS54159869A JP6919678A JP6919678A JPS54159869A JP S54159869 A JPS54159869 A JP S54159869A JP 6919678 A JP6919678 A JP 6919678A JP 6919678 A JP6919678 A JP 6919678A JP S54159869 A JPS54159869 A JP S54159869A
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- heat treatment
- vessel
- dielectric
- wall face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To perform a heat treatment well by providing an insulating means between a dielectric-strength vessel and a reaction vessel and insulating the inside of the reaction vessel from a heater part in space and preventing pollution materials from the heater part from invading in the high-voltage heat treatment unit.
CONSTITUTION: Ring-shaped stainless shielding plate 40 for insulating the inside of quartz tube 23 from the part of heater 24 in space is fixed between the outside wall face of the back edge of quartz tube 23 and the inside wall face of stainless dielectric-strength vessel 42. The inside circumference face of plate 40 is caused to adhere to the outside wall face of quartz tube 23 hermetically, and the outside circumference part is fixed to dielectric-strength vessel 42 by spring 41 as shown in the figure. By this constitution, wafer 12 can be subjected to thermal oxidation while holding the inside of quartz tube 23 clear, so that a clear film quality can be obtained. Thus, when wafer 12 is put into reaction band 29, the inside of quartz tube 23 can be already set to prescribed high temperature and high voltage.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6919678A JPS54159869A (en) | 1978-06-08 | 1978-06-08 | High-voltage heat treatment unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6919678A JPS54159869A (en) | 1978-06-08 | 1978-06-08 | High-voltage heat treatment unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54159869A true JPS54159869A (en) | 1979-12-18 |
Family
ID=13395723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6919678A Pending JPS54159869A (en) | 1978-06-08 | 1978-06-08 | High-voltage heat treatment unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54159869A (en) |
-
1978
- 1978-06-08 JP JP6919678A patent/JPS54159869A/en active Pending
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