JPS54159869A - High-voltage heat treatment unit - Google Patents

High-voltage heat treatment unit

Info

Publication number
JPS54159869A
JPS54159869A JP6919678A JP6919678A JPS54159869A JP S54159869 A JPS54159869 A JP S54159869A JP 6919678 A JP6919678 A JP 6919678A JP 6919678 A JP6919678 A JP 6919678A JP S54159869 A JPS54159869 A JP S54159869A
Authority
JP
Japan
Prior art keywords
quartz tube
heat treatment
vessel
dielectric
wall face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6919678A
Other languages
Japanese (ja)
Inventor
Yoshio Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP6919678A priority Critical patent/JPS54159869A/en
Publication of JPS54159869A publication Critical patent/JPS54159869A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform a heat treatment well by providing an insulating means between a dielectric-strength vessel and a reaction vessel and insulating the inside of the reaction vessel from a heater part in space and preventing pollution materials from the heater part from invading in the high-voltage heat treatment unit.
CONSTITUTION: Ring-shaped stainless shielding plate 40 for insulating the inside of quartz tube 23 from the part of heater 24 in space is fixed between the outside wall face of the back edge of quartz tube 23 and the inside wall face of stainless dielectric-strength vessel 42. The inside circumference face of plate 40 is caused to adhere to the outside wall face of quartz tube 23 hermetically, and the outside circumference part is fixed to dielectric-strength vessel 42 by spring 41 as shown in the figure. By this constitution, wafer 12 can be subjected to thermal oxidation while holding the inside of quartz tube 23 clear, so that a clear film quality can be obtained. Thus, when wafer 12 is put into reaction band 29, the inside of quartz tube 23 can be already set to prescribed high temperature and high voltage.
COPYRIGHT: (C)1979,JPO&Japio
JP6919678A 1978-06-08 1978-06-08 High-voltage heat treatment unit Pending JPS54159869A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6919678A JPS54159869A (en) 1978-06-08 1978-06-08 High-voltage heat treatment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6919678A JPS54159869A (en) 1978-06-08 1978-06-08 High-voltage heat treatment unit

Publications (1)

Publication Number Publication Date
JPS54159869A true JPS54159869A (en) 1979-12-18

Family

ID=13395723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6919678A Pending JPS54159869A (en) 1978-06-08 1978-06-08 High-voltage heat treatment unit

Country Status (1)

Country Link
JP (1) JPS54159869A (en)

Similar Documents

Publication Publication Date Title
JPS54159869A (en) High-voltage heat treatment unit
JPS52146042A (en) Electric heater for heating air
JPS51150132A (en) Method to manufacture a powerf ul infrared-ray radiator
JPS52323A (en) Inside abnormal gas detector of an oil-filled apparatus
JPS52322A (en) Inside abnorla gas detector of an oil-filled apparatus
JPS52114389A (en) Method and apparatus for measurement of photochemical reaction heat
JPS52108541A (en) Heat radiation of electric apparatus
JPS5472534A (en) High frequency heating device
JPS5220453A (en) High frequency heater
JPS5264594A (en) Torus type nuclear fusion device
JPS52155969A (en) Reduced pressure heat treatment furnace of semiconductor wafers
JPS544571A (en) Plasma treating apparatus
JPS525033A (en) High frequency heater
JPS525035A (en) High frequency heater
JPS5654300A (en) Heat treatment of oxide single crystal
JPS52121837A (en) High frequency heating device
JPS5563831A (en) Manufacture of semiconductor device
JPS5272091A (en) Toroidal coil for nuclear fusion device
JPS5464473A (en) High pressure oxidizing method of silicon
JPS52127664A (en) High temperature vessel in supporting construction of fire proofing la yer
JPS51130788A (en) Atomic reactor vessel container
JPS5246511A (en) Extra-high vacuum exhaust system
JPS5296445A (en) Rf wave heating apparatus
JPS51126910A (en) Process and apparatus for removing liquid metals contained in cover ga s
JPS52142525A (en) Fixation apparatus for electrophotography