JPS5562330A - Pressure measuring diaphragm - Google Patents
Pressure measuring diaphragmInfo
- Publication number
- JPS5562330A JPS5562330A JP13562578A JP13562578A JPS5562330A JP S5562330 A JPS5562330 A JP S5562330A JP 13562578 A JP13562578 A JP 13562578A JP 13562578 A JP13562578 A JP 13562578A JP S5562330 A JPS5562330 A JP S5562330A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- channel
- center
- linearity
- circumference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To increase both the linearity and the restoring properties between the actual pressure and the measurement result by forming the Z-shaped thin-depth area between the support part at the circumference and the center pressure measurement part via the concentric circular channels of different diameters.
CONSTITUTION: Circular channel 21 enclosing pressure measurement part 19 is provided on surface 20 at one side and at the border between support part 17 at the circumference of disk-shaped pressure measuring diaphragm 16 and the center pressure measurement part 19. At the same time, another circular channel 23 concentric to channel 21 with a little smaller outer diameter than the inner diameter of channel 21 is provided on the other surface 22. As a result, the Z-shaped thin- depth part 24 is formed between part 17 and part 19 via channels 21 and 23. Part 24 absorbs the tension and the curve toward the center of part 17 caused by the bending of part 19 when the pressure is applied, which results in virtually no malformation of part 17 and a small amount of the energy consumption. Thus the linearity and the restoring properties can be increased between the actual pressure and the measurement result.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13562578A JPS5838732B2 (en) | 1978-11-02 | 1978-11-02 | Diaphragm for pressure measurement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13562578A JPS5838732B2 (en) | 1978-11-02 | 1978-11-02 | Diaphragm for pressure measurement |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5562330A true JPS5562330A (en) | 1980-05-10 |
JPS5838732B2 JPS5838732B2 (en) | 1983-08-25 |
Family
ID=15156171
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13562578A Expired JPS5838732B2 (en) | 1978-11-02 | 1978-11-02 | Diaphragm for pressure measurement |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5838732B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5988633A (en) * | 1982-11-12 | 1984-05-22 | Matsushita Electric Ind Co Ltd | Pressure sensor unit |
JPH0381635A (en) * | 1989-02-28 | 1991-04-08 | United Technol Corp <Utc> | Capacitive type sensor having linear responsiveness and method of obtaining linear responsiveness |
-
1978
- 1978-11-02 JP JP13562578A patent/JPS5838732B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5988633A (en) * | 1982-11-12 | 1984-05-22 | Matsushita Electric Ind Co Ltd | Pressure sensor unit |
JPH0381635A (en) * | 1989-02-28 | 1991-04-08 | United Technol Corp <Utc> | Capacitive type sensor having linear responsiveness and method of obtaining linear responsiveness |
Also Published As
Publication number | Publication date |
---|---|
JPS5838732B2 (en) | 1983-08-25 |
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