JPS5562330A - Pressure measuring diaphragm - Google Patents

Pressure measuring diaphragm

Info

Publication number
JPS5562330A
JPS5562330A JP13562578A JP13562578A JPS5562330A JP S5562330 A JPS5562330 A JP S5562330A JP 13562578 A JP13562578 A JP 13562578A JP 13562578 A JP13562578 A JP 13562578A JP S5562330 A JPS5562330 A JP S5562330A
Authority
JP
Japan
Prior art keywords
pressure
channel
center
linearity
circumference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13562578A
Other languages
Japanese (ja)
Other versions
JPS5838732B2 (en
Inventor
Mitsuru Tamai
Takeshi Yasuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP13562578A priority Critical patent/JPS5838732B2/en
Publication of JPS5562330A publication Critical patent/JPS5562330A/en
Publication of JPS5838732B2 publication Critical patent/JPS5838732B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To increase both the linearity and the restoring properties between the actual pressure and the measurement result by forming the Z-shaped thin-depth area between the support part at the circumference and the center pressure measurement part via the concentric circular channels of different diameters.
CONSTITUTION: Circular channel 21 enclosing pressure measurement part 19 is provided on surface 20 at one side and at the border between support part 17 at the circumference of disk-shaped pressure measuring diaphragm 16 and the center pressure measurement part 19. At the same time, another circular channel 23 concentric to channel 21 with a little smaller outer diameter than the inner diameter of channel 21 is provided on the other surface 22. As a result, the Z-shaped thin- depth part 24 is formed between part 17 and part 19 via channels 21 and 23. Part 24 absorbs the tension and the curve toward the center of part 17 caused by the bending of part 19 when the pressure is applied, which results in virtually no malformation of part 17 and a small amount of the energy consumption. Thus the linearity and the restoring properties can be increased between the actual pressure and the measurement result.
COPYRIGHT: (C)1980,JPO&Japio
JP13562578A 1978-11-02 1978-11-02 Diaphragm for pressure measurement Expired JPS5838732B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13562578A JPS5838732B2 (en) 1978-11-02 1978-11-02 Diaphragm for pressure measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13562578A JPS5838732B2 (en) 1978-11-02 1978-11-02 Diaphragm for pressure measurement

Publications (2)

Publication Number Publication Date
JPS5562330A true JPS5562330A (en) 1980-05-10
JPS5838732B2 JPS5838732B2 (en) 1983-08-25

Family

ID=15156171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13562578A Expired JPS5838732B2 (en) 1978-11-02 1978-11-02 Diaphragm for pressure measurement

Country Status (1)

Country Link
JP (1) JPS5838732B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5988633A (en) * 1982-11-12 1984-05-22 Matsushita Electric Ind Co Ltd Pressure sensor unit
JPH0381635A (en) * 1989-02-28 1991-04-08 United Technol Corp <Utc> Capacitive type sensor having linear responsiveness and method of obtaining linear responsiveness

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5988633A (en) * 1982-11-12 1984-05-22 Matsushita Electric Ind Co Ltd Pressure sensor unit
JPH0381635A (en) * 1989-02-28 1991-04-08 United Technol Corp <Utc> Capacitive type sensor having linear responsiveness and method of obtaining linear responsiveness

Also Published As

Publication number Publication date
JPS5838732B2 (en) 1983-08-25

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