JPS555852B2 - - Google Patents
Info
- Publication number
- JPS555852B2 JPS555852B2 JP9823075A JP9823075A JPS555852B2 JP S555852 B2 JPS555852 B2 JP S555852B2 JP 9823075 A JP9823075 A JP 9823075A JP 9823075 A JP9823075 A JP 9823075A JP S555852 B2 JPS555852 B2 JP S555852B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9823075A JPS5222477A (en) | 1975-08-13 | 1975-08-13 | Sic-si type equalizing tube for manufacturing gas impermeable semi conductors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9823075A JPS5222477A (en) | 1975-08-13 | 1975-08-13 | Sic-si type equalizing tube for manufacturing gas impermeable semi conductors |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60056908A Division JPS60258918A (ja) | 1985-03-20 | 1985-03-20 | ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法 |
| JP60056907A Division JPS60258917A (ja) | 1985-03-20 | 1985-03-20 | ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5222477A JPS5222477A (en) | 1977-02-19 |
| JPS555852B2 true JPS555852B2 (OSRAM) | 1980-02-12 |
Family
ID=14214148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9823075A Granted JPS5222477A (en) | 1975-08-13 | 1975-08-13 | Sic-si type equalizing tube for manufacturing gas impermeable semi conductors |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5222477A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3338755A1 (de) * | 1982-10-28 | 1984-05-03 | Toshiba Ceramics Co., Ltd., Tokio/Topkyo | Formkoerper auf siliziumkarbidbasis zum einsatz bei der halbleiterherstellung |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56150824A (en) * | 1980-04-24 | 1981-11-21 | Toshiba Ceramics Co Ltd | Silicon carbide core tube for semiconductor diffusion furnace |
| JPS57186263U (OSRAM) * | 1981-05-20 | 1982-11-26 | ||
| JPS5891017A (ja) * | 1981-11-26 | 1983-05-30 | Denki Kagaku Kogyo Kk | α型窒化珪素の精製法 |
| JPS597589A (ja) * | 1982-07-07 | 1984-01-14 | 工業技術院長 | 把持力検出装置 |
| JPS619272U (ja) * | 1984-06-19 | 1986-01-20 | 財団法人鉄道総合技術研究所 | 締付トルク測定記録機構付ボルト緊解機 |
| JPH0727874B2 (ja) * | 1984-12-26 | 1995-03-29 | 株式会社日立製作所 | 半導体ウエハの熱処理装置 |
| JPS60258918A (ja) * | 1985-03-20 | 1985-12-20 | Toshiba Ceramics Co Ltd | ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法 |
| JPH0249421A (ja) * | 1989-04-28 | 1990-02-19 | Toshiba Ceramics Co Ltd | 拡散炉用炉心管の構造 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3951587A (en) * | 1974-12-06 | 1976-04-20 | Norton Company | Silicon carbide diffusion furnace components |
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1975
- 1975-08-13 JP JP9823075A patent/JPS5222477A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3338755A1 (de) * | 1982-10-28 | 1984-05-03 | Toshiba Ceramics Co., Ltd., Tokio/Topkyo | Formkoerper auf siliziumkarbidbasis zum einsatz bei der halbleiterherstellung |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5222477A (en) | 1977-02-19 |