JPS5558367A - Evaporation jig - Google Patents
Evaporation jigInfo
- Publication number
- JPS5558367A JPS5558367A JP13053878A JP13053878A JPS5558367A JP S5558367 A JPS5558367 A JP S5558367A JP 13053878 A JP13053878 A JP 13053878A JP 13053878 A JP13053878 A JP 13053878A JP S5558367 A JPS5558367 A JP S5558367A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- board
- mask
- frame
- screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13053878A JPS5558367A (en) | 1978-10-25 | 1978-10-25 | Evaporation jig |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13053878A JPS5558367A (en) | 1978-10-25 | 1978-10-25 | Evaporation jig |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5558367A true JPS5558367A (en) | 1980-05-01 |
Family
ID=15036675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13053878A Pending JPS5558367A (en) | 1978-10-25 | 1978-10-25 | Evaporation jig |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5558367A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5372694A (en) * | 1992-12-14 | 1994-12-13 | Leybold Aktiengesellschaft | Target for cathode sputtering |
KR100499476B1 (ko) * | 2002-07-22 | 2005-07-05 | 엘지전자 주식회사 | 유기 el 소자의 새도우 마스크 |
-
1978
- 1978-10-25 JP JP13053878A patent/JPS5558367A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5372694A (en) * | 1992-12-14 | 1994-12-13 | Leybold Aktiengesellschaft | Target for cathode sputtering |
KR100499476B1 (ko) * | 2002-07-22 | 2005-07-05 | 엘지전자 주식회사 | 유기 el 소자의 새도우 마스크 |
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