JPS5556011A - Production of boron structural material - Google Patents
Production of boron structural materialInfo
- Publication number
- JPS5556011A JPS5556011A JP12911878A JP12911878A JPS5556011A JP S5556011 A JPS5556011 A JP S5556011A JP 12911878 A JP12911878 A JP 12911878A JP 12911878 A JP12911878 A JP 12911878A JP S5556011 A JPS5556011 A JP S5556011A
- Authority
- JP
- Japan
- Prior art keywords
- boron
- substrate
- layer
- structural material
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 title abstract 11
- 229910052796 boron Inorganic materials 0.000 title abstract 11
- 239000000463 material Substances 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 abstract 7
- 229910052804 chromium Inorganic materials 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract 2
- 238000005229 chemical vapour deposition Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 abstract 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 abstract 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052794 bromium Inorganic materials 0.000 abstract 1
- 238000000354 decomposition reaction Methods 0.000 abstract 1
- 238000009713 electroplating Methods 0.000 abstract 1
- 229910052740 iodine Inorganic materials 0.000 abstract 1
- 239000011630 iodine Substances 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12911878A JPS5556011A (en) | 1978-10-19 | 1978-10-19 | Production of boron structural material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12911878A JPS5556011A (en) | 1978-10-19 | 1978-10-19 | Production of boron structural material |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5556011A true JPS5556011A (en) | 1980-04-24 |
JPS6149247B2 JPS6149247B2 (enrdf_load_stackoverflow) | 1986-10-28 |
Family
ID=15001509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12911878A Granted JPS5556011A (en) | 1978-10-19 | 1978-10-19 | Production of boron structural material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5556011A (enrdf_load_stackoverflow) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5216201A (en) * | 1975-07-29 | 1977-02-07 | Toshiba Corp | Manufacturing method of pick-up cantilever |
-
1978
- 1978-10-19 JP JP12911878A patent/JPS5556011A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5216201A (en) * | 1975-07-29 | 1977-02-07 | Toshiba Corp | Manufacturing method of pick-up cantilever |
Also Published As
Publication number | Publication date |
---|---|
JPS6149247B2 (enrdf_load_stackoverflow) | 1986-10-28 |
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