JPS5555235A - Electric capacity type pressure detector - Google Patents
Electric capacity type pressure detectorInfo
- Publication number
- JPS5555235A JPS5555235A JP12794578A JP12794578A JPS5555235A JP S5555235 A JPS5555235 A JP S5555235A JP 12794578 A JP12794578 A JP 12794578A JP 12794578 A JP12794578 A JP 12794578A JP S5555235 A JPS5555235 A JP S5555235A
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- recess
- electric capacity
- diaphragm
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To improve the quality of an electric capacity type pressure detector, by providing a recess on a base plate and prescribing electrode lead-out positions.
CONSTITUTION: A circular recess 10 is provided on one side of an electrically insulating circular base plate 2 except for its peripheral part. A first electrode 3 is circularly provided at the bottom 10a of the recess 10. A second electrode 4 is circularly provided on the bottom of on electrically insulating circular diaphragm 1. The diaphragm 1 is fixed with an electroconductive seal 5 on the base plate 2. The pressure of a reference pressure chamber 9 defined by the diaphragm 1 and the base plate 2 is reduced to a prescribed level through a penetrating hole 8c. The chamber 9 is then sealed up by a bonding agent 11. Lead members 7a, 7b are inserted into other penetrating holes 8a, 8b and connected to the first and the second electrodes 3, 4 directly or through the electroconductive seal 5. The distance between the electrodes 3, 4 depends on the depth of the recess 10. The distance does not fluctuate althought the thickness of the electroconductive seal 5 is not accurately controlled. This results in providing a high- quality detector in which the fluctuation in the electric capacity between the lead members 7a, 7b is little.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12794578A JPS5555235A (en) | 1978-10-18 | 1978-10-18 | Electric capacity type pressure detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12794578A JPS5555235A (en) | 1978-10-18 | 1978-10-18 | Electric capacity type pressure detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5555235A true JPS5555235A (en) | 1980-04-23 |
Family
ID=14972515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12794578A Pending JPS5555235A (en) | 1978-10-18 | 1978-10-18 | Electric capacity type pressure detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5555235A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5866042U (en) * | 1981-10-24 | 1983-05-04 | 株式会社土屋製作所 | Lubricating oil supply device for press machines |
| JPS58210534A (en) * | 1982-06-01 | 1983-12-07 | Citizen Watch Co Ltd | Pressure detector |
| JPS59148842A (en) * | 1983-02-15 | 1984-08-25 | Matsushita Electric Ind Co Ltd | Manufacture of electrostatic capacity-type pressure sensor |
| JPS60219528A (en) * | 1984-03-30 | 1985-11-02 | エルサグ・インターナショナル・ビー・ブイ | Molten silica diaphragm module for high-temperature pressuretransducer |
| JPH03501063A (en) * | 1989-04-01 | 1991-03-07 | エンドレス ウント ハウザー ゲゼルシヤフト ミツト ベシユレンクテル ハフツング ウント コンパニー | Capacitive pressure sensor and its manufacturing method |
| JP2003042875A (en) * | 2001-07-26 | 2003-02-13 | Kyocera Corp | Package for pressure detecting apparatus |
| JP2012154953A (en) * | 2006-12-25 | 2012-08-16 | Kyocera Corp | Package for pressure sensor, its manufacturing method, and pressure sensor |
-
1978
- 1978-10-18 JP JP12794578A patent/JPS5555235A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5866042U (en) * | 1981-10-24 | 1983-05-04 | 株式会社土屋製作所 | Lubricating oil supply device for press machines |
| JPS58210534A (en) * | 1982-06-01 | 1983-12-07 | Citizen Watch Co Ltd | Pressure detector |
| JPS59148842A (en) * | 1983-02-15 | 1984-08-25 | Matsushita Electric Ind Co Ltd | Manufacture of electrostatic capacity-type pressure sensor |
| JPS60219528A (en) * | 1984-03-30 | 1985-11-02 | エルサグ・インターナショナル・ビー・ブイ | Molten silica diaphragm module for high-temperature pressuretransducer |
| JPH03501063A (en) * | 1989-04-01 | 1991-03-07 | エンドレス ウント ハウザー ゲゼルシヤフト ミツト ベシユレンクテル ハフツング ウント コンパニー | Capacitive pressure sensor and its manufacturing method |
| JP2003042875A (en) * | 2001-07-26 | 2003-02-13 | Kyocera Corp | Package for pressure detecting apparatus |
| JP2012154953A (en) * | 2006-12-25 | 2012-08-16 | Kyocera Corp | Package for pressure sensor, its manufacturing method, and pressure sensor |
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