JPS5548610U - - Google Patents

Info

Publication number
JPS5548610U
JPS5548610U JP13030278U JP13030278U JPS5548610U JP S5548610 U JPS5548610 U JP S5548610U JP 13030278 U JP13030278 U JP 13030278U JP 13030278 U JP13030278 U JP 13030278U JP S5548610 U JPS5548610 U JP S5548610U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13030278U
Other languages
Japanese (ja)
Other versions
JPS5854784Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13030278U priority Critical patent/JPS5854784Y2/ja
Publication of JPS5548610U publication Critical patent/JPS5548610U/ja
Application granted granted Critical
Publication of JPS5854784Y2 publication Critical patent/JPS5854784Y2/ja
Expired legal-status Critical Current

Links

JP13030278U 1978-09-25 1978-09-25 立体走査電子顕微鏡 Expired JPS5854784Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13030278U JPS5854784Y2 (ja) 1978-09-25 1978-09-25 立体走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13030278U JPS5854784Y2 (ja) 1978-09-25 1978-09-25 立体走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS5548610U true JPS5548610U (enrdf_load_stackoverflow) 1980-03-29
JPS5854784Y2 JPS5854784Y2 (ja) 1983-12-14

Family

ID=29095792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13030278U Expired JPS5854784Y2 (ja) 1978-09-25 1978-09-25 立体走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS5854784Y2 (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62129669U (enrdf_load_stackoverflow) * 1986-02-07 1987-08-17
JP2000348658A (ja) * 1999-04-15 2000-12-15 Applied Materials Inc 荷電粒子ビーム装置用カラム
JP2001015055A (ja) * 1999-04-15 2001-01-19 Applied Materials Inc 荷電粒子ビームカラム
EP2023373A2 (en) 2002-09-11 2009-02-11 Hitachi High-Technologies Corporation Charged particle beam apparatus and irradiation method
JP2010009907A (ja) * 2008-06-26 2010-01-14 Hitachi High-Technologies Corp 荷電粒子線装置
JP2011040240A (ja) * 2009-08-10 2011-02-24 Hitachi High-Technologies Corp 荷電粒子線装置及び画像表示方法
DE112012005293B4 (de) 2012-01-06 2021-08-05 Hitachi High-Tech Corporation Ladungsteilchenstrahlvorrichtung und Anzeigeverfahren für eine geneigte Abbildung

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62129669U (enrdf_load_stackoverflow) * 1986-02-07 1987-08-17
JP2000348658A (ja) * 1999-04-15 2000-12-15 Applied Materials Inc 荷電粒子ビーム装置用カラム
JP2001015055A (ja) * 1999-04-15 2001-01-19 Applied Materials Inc 荷電粒子ビームカラム
EP2023373A2 (en) 2002-09-11 2009-02-11 Hitachi High-Technologies Corporation Charged particle beam apparatus and irradiation method
JP2010009907A (ja) * 2008-06-26 2010-01-14 Hitachi High-Technologies Corp 荷電粒子線装置
JP2011040240A (ja) * 2009-08-10 2011-02-24 Hitachi High-Technologies Corp 荷電粒子線装置及び画像表示方法
DE112010002918T5 (de) 2009-08-10 2012-06-21 Hitachi High-Technologies Corporation Vorrichtung für einen Strahl geladener Teichen und Abbildungsanzeigeverfahren
US9202669B2 (en) 2009-08-10 2015-12-01 Hitachi High-Technologies Corporation Charged particle beam device and image display method for stereoscopic observation and stereoscopic display
DE112012005293B4 (de) 2012-01-06 2021-08-05 Hitachi High-Tech Corporation Ladungsteilchenstrahlvorrichtung und Anzeigeverfahren für eine geneigte Abbildung

Also Published As

Publication number Publication date
JPS5854784Y2 (ja) 1983-12-14

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