JPS5548108B2 - - Google Patents
Info
- Publication number
- JPS5548108B2 JPS5548108B2 JP2807577A JP2807577A JPS5548108B2 JP S5548108 B2 JPS5548108 B2 JP S5548108B2 JP 2807577 A JP2807577 A JP 2807577A JP 2807577 A JP2807577 A JP 2807577A JP S5548108 B2 JPS5548108 B2 JP S5548108B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2807577A JPS53113782A (en) | 1977-03-16 | 1977-03-16 | Forming apparatus for film deposited evaporation having no pin hole |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2807577A JPS53113782A (en) | 1977-03-16 | 1977-03-16 | Forming apparatus for film deposited evaporation having no pin hole |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53113782A JPS53113782A (en) | 1978-10-04 |
| JPS5548108B2 true JPS5548108B2 (enExample) | 1980-12-04 |
Family
ID=12238643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2807577A Granted JPS53113782A (en) | 1977-03-16 | 1977-03-16 | Forming apparatus for film deposited evaporation having no pin hole |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53113782A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6068541A (ja) * | 1983-09-21 | 1985-04-19 | Toyota Central Res & Dev Lab Inc | 擬似動態画像の撮影方法 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100696071B1 (ko) * | 2006-12-29 | 2007-03-16 | 심국현 | 퍼머롯드와 이러한 퍼머롯드에 효율적인 전열을 수행하는가열장치 |
| US8696815B2 (en) | 2009-09-01 | 2014-04-15 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
| KR20130004830A (ko) | 2011-07-04 | 2013-01-14 | 삼성디스플레이 주식회사 | 유기층 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법 |
| KR102175820B1 (ko) * | 2013-09-12 | 2020-11-09 | 삼성디스플레이 주식회사 | 증착원 반송 장치 |
-
1977
- 1977-03-16 JP JP2807577A patent/JPS53113782A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6068541A (ja) * | 1983-09-21 | 1985-04-19 | Toyota Central Res & Dev Lab Inc | 擬似動態画像の撮影方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53113782A (en) | 1978-10-04 |