JPS5543663Y2 - - Google Patents
Info
- Publication number
- JPS5543663Y2 JPS5543663Y2 JP5350474U JP5350474U JPS5543663Y2 JP S5543663 Y2 JPS5543663 Y2 JP S5543663Y2 JP 5350474 U JP5350474 U JP 5350474U JP 5350474 U JP5350474 U JP 5350474U JP S5543663 Y2 JPS5543663 Y2 JP S5543663Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5350474U JPS5543663Y2 (ja) | 1974-05-11 | 1974-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5350474U JPS5543663Y2 (ja) | 1974-05-11 | 1974-05-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50143466U JPS50143466U (ja) | 1975-11-27 |
| JPS5543663Y2 true JPS5543663Y2 (ja) | 1980-10-14 |
Family
ID=28202363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5350474U Expired JPS5543663Y2 (ja) | 1974-05-11 | 1974-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5543663Y2 (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0756788B2 (ja) * | 1987-12-04 | 1995-06-14 | 株式会社日立製作所 | 電子顕微鏡 |
| JP5770434B2 (ja) * | 2010-06-24 | 2015-08-26 | 株式会社堀場製作所 | 電子顕微鏡装置 |
| JP2012138324A (ja) * | 2010-12-28 | 2012-07-19 | Topcon Corp | 二次電子検出器、及び荷電粒子ビーム装置 |
| JP2015164091A (ja) * | 2012-05-11 | 2015-09-10 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡 |
| JP5623590B2 (ja) * | 2013-05-13 | 2014-11-12 | 株式会社堀場製作所 | 電子顕微鏡装置 |
| JP7008519B2 (ja) * | 2018-01-30 | 2022-01-25 | 日本電子株式会社 | 荷電粒子線装置 |
-
1974
- 1974-05-11 JP JP5350474U patent/JPS5543663Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50143466U (ja) | 1975-11-27 |