JPS5537098B1 - - Google Patents

Info

Publication number
JPS5537098B1
JPS5537098B1 JP5271171A JP5271171A JPS5537098B1 JP S5537098 B1 JPS5537098 B1 JP S5537098B1 JP 5271171 A JP5271171 A JP 5271171A JP 5271171 A JP5271171 A JP 5271171A JP S5537098 B1 JPS5537098 B1 JP S5537098B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5271171A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5271171A priority Critical patent/JPS5537098B1/ja
Priority to US00270507A priority patent/US3808485A/en
Priority to GB3242272A priority patent/GB1397744A/en
Priority to DE2234154A priority patent/DE2234154C3/de
Priority to FR7225572A priority patent/FR2145710B1/fr
Publication of JPS5537098B1 publication Critical patent/JPS5537098B1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0015—Orientation; Alignment; Positioning

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Control Of Position Or Direction (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Selective Calling Equipment (AREA)
  • Optical Communication System (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Stepping Motors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP5271171A 1971-07-15 1971-07-15 Pending JPS5537098B1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP5271171A JPS5537098B1 (ja) 1971-07-15 1971-07-15
US00270507A US3808485A (en) 1971-07-15 1972-07-10 Manipulator
GB3242272A GB1397744A (en) 1971-07-15 1972-07-11 Motor speed control device
DE2234154A DE2234154C3 (de) 1971-07-15 1972-07-12 Manipulator, insbesondere für die Herstellung von integrierten Schaltkreisen
FR7225572A FR2145710B1 (ja) 1971-07-15 1972-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5271171A JPS5537098B1 (ja) 1971-07-15 1971-07-15

Publications (1)

Publication Number Publication Date
JPS5537098B1 true JPS5537098B1 (ja) 1980-09-25

Family

ID=12922468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5271171A Pending JPS5537098B1 (ja) 1971-07-15 1971-07-15

Country Status (5)

Country Link
US (1) US3808485A (ja)
JP (1) JPS5537098B1 (ja)
DE (1) DE2234154C3 (ja)
FR (1) FR2145710B1 (ja)
GB (1) GB1397744A (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2658698A1 (de) * 1976-12-23 1978-06-29 Linde Ag Steuereinrichtung fuer eine brennkraftmaschine
DE2739538C2 (de) * 1977-09-02 1982-10-21 Jungheinrich Unternehmensverwaltung Kg, 2000 Hamburg Fahrschalter mit einem berührungslos arbeitenden Betätigungselement in der Anordnung an einem Elektrofahrzeug
DE3682834D1 (de) * 1985-06-17 1992-01-23 Hitachi Ltd Sondenkontrollverfahren und -geraet fuer einen apparat mit mehreren freiheitsgraden.
JP2733769B2 (ja) * 1988-05-20 1998-03-30 蛇の目ミシン工業株式会社 ワイヤレスコントローラを有するミシン
US5054141A (en) * 1989-07-28 1991-10-08 Hill-Rom Company, Inc. Hospital bed having a Y-shaped base
US5077923A (en) * 1989-09-07 1992-01-07 Rock-Ola Manufacturing Corporation Program display for coin operated compact disc phonograph
US10490579B2 (en) * 2017-12-28 2019-11-26 Wuhan China Star Optoelectronics Technology Co., Ltd. Mask having intermediate light-transmitting sub-sections of stepwisely increased transmission rates

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3096444A (en) * 1958-04-29 1963-07-02 Harold H Seward Electromechanical transducing system
DE1438995A1 (de) * 1963-04-26 1968-12-19 Continental Elektro Ind Ag Durch Steuerimpulse synchronisierbarer elektrischer Antrieb
US3414790A (en) * 1964-08-21 1968-12-03 Lear Jet Corp Photoelectric motor speed control
US3465221A (en) * 1967-01-23 1969-09-02 Ametek Inc Compass card autopilot with 360 degree directional control
US3514685A (en) * 1967-04-24 1970-05-26 Fan Tron Corp Optical speed transducer

Also Published As

Publication number Publication date
DE2234154A1 (de) 1973-02-01
US3808485A (en) 1974-04-30
DE2234154C3 (de) 1975-07-24
GB1397744A (en) 1975-06-18
FR2145710B1 (ja) 1979-01-12
FR2145710A1 (ja) 1973-02-23
DE2234154B2 (de) 1974-12-19

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