JPS5534316B2 - - Google Patents

Info

Publication number
JPS5534316B2
JPS5534316B2 JP9822776A JP9822776A JPS5534316B2 JP S5534316 B2 JPS5534316 B2 JP S5534316B2 JP 9822776 A JP9822776 A JP 9822776A JP 9822776 A JP9822776 A JP 9822776A JP S5534316 B2 JPS5534316 B2 JP S5534316B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9822776A
Other languages
Japanese (ja)
Other versions
JPS5324605A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9822776A priority Critical patent/JPS5324605A/ja
Publication of JPS5324605A publication Critical patent/JPS5324605A/ja
Publication of JPS5534316B2 publication Critical patent/JPS5534316B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP9822776A 1976-08-19 1976-08-19 Biimorph vibrator pumps Granted JPS5324605A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9822776A JPS5324605A (en) 1976-08-19 1976-08-19 Biimorph vibrator pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9822776A JPS5324605A (en) 1976-08-19 1976-08-19 Biimorph vibrator pumps

Publications (2)

Publication Number Publication Date
JPS5324605A JPS5324605A (en) 1978-03-07
JPS5534316B2 true JPS5534316B2 (cs) 1980-09-05

Family

ID=14214062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9822776A Granted JPS5324605A (en) 1976-08-19 1976-08-19 Biimorph vibrator pumps

Country Status (1)

Country Link
JP (1) JPS5324605A (cs)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5634986A (en) * 1979-08-28 1981-04-07 Kureha Chem Ind Co Ltd Fluid minute drive unit
JPS58101276A (ja) * 1981-12-04 1983-06-16 サミユエル ピ−.ベスマン 圧電効果ダイヤフラム式マイクロポンプ装置
JPS5968578A (ja) * 1982-10-08 1984-04-18 Sharp Corp 送液ポンプ
JPS5968192U (ja) * 1982-10-29 1984-05-09 シャープ株式会社 気化式液体燃料燃焼装置
JPS5982591A (ja) * 1982-11-01 1984-05-12 Sharp Corp 送液ポンプ
JPS58112329U (ja) * 1982-11-15 1983-08-01 呉羽化学工業株式会社 流体の微駆動装置
JPWO2005012730A1 (ja) * 2003-08-05 2006-09-21 イーメックス株式会社 ポンプ
JP5041855B2 (ja) 2007-04-09 2012-10-03 イーメックス株式会社 アクチュエータ体および絞り機構
JP5323163B2 (ja) * 2011-10-28 2013-10-23 ルーカス・イスル セラミック振動子を具備する油圧動力ユニット、及び該油圧動力ユニットを具備する油圧エンジン
CN104583640B (zh) * 2012-08-15 2016-01-20 北京京西重工有限公司 悬架装置
JP6570778B1 (ja) 2019-02-28 2019-09-04 株式会社イワキ チューブフラムポンプ

Also Published As

Publication number Publication date
JPS5324605A (en) 1978-03-07

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