JPS5324605A - Biimorph vibrator pumps - Google Patents

Biimorph vibrator pumps

Info

Publication number
JPS5324605A
JPS5324605A JP9822776A JP9822776A JPS5324605A JP S5324605 A JPS5324605 A JP S5324605A JP 9822776 A JP9822776 A JP 9822776A JP 9822776 A JP9822776 A JP 9822776A JP S5324605 A JPS5324605 A JP S5324605A
Authority
JP
Japan
Prior art keywords
biimorph
vibrator
pumps
vibrator pumps
biimorph vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9822776A
Other languages
Japanese (ja)
Other versions
JPS5534316B2 (en
Inventor
Tetsuji Narasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOUKUU UCHIYUU GIJIYUTSU KENKI
Original Assignee
KOUKUU UCHIYUU GIJIYUTSU KENKI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOUKUU UCHIYUU GIJIYUTSU KENKI filed Critical KOUKUU UCHIYUU GIJIYUTSU KENKI
Priority to JP9822776A priority Critical patent/JPS5324605A/en
Publication of JPS5324605A publication Critical patent/JPS5324605A/en
Publication of JPS5534316B2 publication Critical patent/JPS5534316B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP9822776A 1976-08-19 1976-08-19 Biimorph vibrator pumps Granted JPS5324605A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9822776A JPS5324605A (en) 1976-08-19 1976-08-19 Biimorph vibrator pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9822776A JPS5324605A (en) 1976-08-19 1976-08-19 Biimorph vibrator pumps

Publications (2)

Publication Number Publication Date
JPS5324605A true JPS5324605A (en) 1978-03-07
JPS5534316B2 JPS5534316B2 (en) 1980-09-05

Family

ID=14214062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9822776A Granted JPS5324605A (en) 1976-08-19 1976-08-19 Biimorph vibrator pumps

Country Status (1)

Country Link
JP (1) JPS5324605A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5634986A (en) * 1979-08-28 1981-04-07 Kureha Chem Ind Co Ltd Fluid minute drive unit
JPS58101276A (en) * 1981-12-04 1983-06-16 サミユエル　ピ−．ベスマン Piezoelectric effect diaphragm type micropump device
JPS58112329U (en) * 1982-11-15 1983-08-01 呉羽化学工業株式会社 Fluid fine drive device
JPS5968578A (en) * 1982-10-08 1984-04-18 Sharp Corp Liquid feed pump
JPS5968192U (en) * 1982-10-29 1984-05-09 シャープ株式会社 Vaporized liquid fuel combustion device
JPS5982591A (en) * 1982-11-01 1984-05-12 Sharp Corp Liquid feed pump
WO2005012730A1 (en) * 2003-08-05 2005-02-10 Eamex Corporation Pump
WO2008126613A1 (en) * 2007-04-09 2008-10-23 Eamex Corporation Actuator body and throttle mechanism
JP2013096262A (en) * 2011-10-28 2013-05-20 Lucas Ihsl Hydraulic power unit with ceramic oscillator and hydraulic engine equipped with the hydraulic power unit
EP2820321A1 (en) * 2012-08-15 2015-01-07 BeijingWest Industries Co. Ltd. A mount apparatus
JP2020139457A (en) * 2019-02-28 2020-09-03 株式会社イワキ Tubephragm pump

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5634986A (en) * 1979-08-28 1981-04-07 Kureha Chem Ind Co Ltd Fluid minute drive unit
JPS58101276A (en) * 1981-12-04 1983-06-16 サミユエル　ピ−．ベスマン Piezoelectric effect diaphragm type micropump device
JPS5968578A (en) * 1982-10-08 1984-04-18 Sharp Corp Liquid feed pump
JPS5968192U (en) * 1982-10-29 1984-05-09 シャープ株式会社 Vaporized liquid fuel combustion device
JPS5982591A (en) * 1982-11-01 1984-05-12 Sharp Corp Liquid feed pump
JPS58112329U (en) * 1982-11-15 1983-08-01 呉羽化学工業株式会社 Fluid fine drive device
WO2005012730A1 (en) * 2003-08-05 2005-02-10 Eamex Corporation Pump
JP2008259381A (en) * 2007-04-09 2008-10-23 Eamex Co Actuator body and aperture mechanism
WO2008126613A1 (en) * 2007-04-09 2008-10-23 Eamex Corporation Actuator body and throttle mechanism
US7917027B2 (en) 2007-04-09 2011-03-29 Eamex Corporation Actuator body and throttle mechanism
JP2013096262A (en) * 2011-10-28 2013-05-20 Lucas Ihsl Hydraulic power unit with ceramic oscillator and hydraulic engine equipped with the hydraulic power unit
EP2820321A1 (en) * 2012-08-15 2015-01-07 BeijingWest Industries Co. Ltd. A mount apparatus
JP2015505014A (en) * 2012-08-15 2015-02-16 ベイジンウェスト・インダストリーズ・カンパニー・リミテッドＢｅｉｊｉｎｇｗｅｓｔ Ｉｎｄｕｓｔｒｉｅｓ Ｃｏ．， Ｌｔｄ． Mounting device
EP2820321A4 (en) * 2012-08-15 2016-01-20 Beijingwest Ind Co Ltd A mount apparatus
US9440524B2 (en) 2012-08-15 2016-09-13 Beijingwest Industries, Co., Ltd. Mount apparatus
JP2020139457A (en) * 2019-02-28 2020-09-03 株式会社イワキ Tubephragm pump
US11313362B2 (en) 2019-02-28 2022-04-26 Iwaki Co., Ltd. Tubephragm pump

Also Published As

Publication number Publication date
JPS5534316B2 (en) 1980-09-05

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