JPS5533644A - Meter for multi-layer film characteristic - Google Patents

Meter for multi-layer film characteristic

Info

Publication number
JPS5533644A
JPS5533644A JP10668278A JP10668278A JPS5533644A JP S5533644 A JPS5533644 A JP S5533644A JP 10668278 A JP10668278 A JP 10668278A JP 10668278 A JP10668278 A JP 10668278A JP S5533644 A JPS5533644 A JP S5533644A
Authority
JP
Japan
Prior art keywords
spectroscope
sample
output
light
transmissivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10668278A
Other languages
Japanese (ja)
Inventor
Seiji Miyazaki
Hideo Kuwabara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10668278A priority Critical patent/JPS5533644A/en
Publication of JPS5533644A publication Critical patent/JPS5533644A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands

Abstract

PURPOSE:To make it possible to measure at a high speed the characteristics of a multi-layer film over a wide wave band range by providing a spectroscope for receiving the light having passed through the multi-layer film, an optical detector for detecting the spectroscopic output, and an indicator for indicating the detected output in accordance with the wavelength. CONSTITUTION:The light from a light source 21 is converted by lenses 22 and 23 into a parallel beam, which is introduced from an aperture 25 into a sample 27 arranged in a vacuum bath 24 and evaporated with a dielectric thin film. The light having passed through the sample 27 is converged through an aperture 26 by a lens 28 and introduced into a spectroscope 29. The spectroscopic output of the spectroscope 29 is focused upon the photosensitive surface 32 of an optical detector 33, the output of which is fed to a synchroscope 33 the detected output corresponding to the transmissivity of the sample 17 for each wavelength is displayed. If it is assumed that the light emitting characteristics of the light source 21 are flat within a desired wavelength range, the spectroscopic output of the spectroscope 29 indicates the transmissivity of the sample for each wavelength. Thus, any film thickness can be accurately measured from the relationship between the film thickness and the transmissivity. At the same time, the characteristics over a desired wavelength range can be measured at a high speed.
JP10668278A 1978-08-31 1978-08-31 Meter for multi-layer film characteristic Pending JPS5533644A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10668278A JPS5533644A (en) 1978-08-31 1978-08-31 Meter for multi-layer film characteristic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10668278A JPS5533644A (en) 1978-08-31 1978-08-31 Meter for multi-layer film characteristic

Publications (1)

Publication Number Publication Date
JPS5533644A true JPS5533644A (en) 1980-03-08

Family

ID=14439827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10668278A Pending JPS5533644A (en) 1978-08-31 1978-08-31 Meter for multi-layer film characteristic

Country Status (1)

Country Link
JP (1) JPS5533644A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162917A (en) * 1983-03-07 1984-09-13 Ishigaki Kiko Kk Filter cloth winding-up apparatus of filter press
GB2379735A (en) * 2001-09-14 2003-03-19 Qinetiq Ltd Method and apparatus for controlling the growth of thin film during deposition process by measuring the rate of change of optical thickness of the thin-film

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162917A (en) * 1983-03-07 1984-09-13 Ishigaki Kiko Kk Filter cloth winding-up apparatus of filter press
JPH0256924B2 (en) * 1983-03-07 1990-12-03 Ishigaki Mech Ind
GB2379735A (en) * 2001-09-14 2003-03-19 Qinetiq Ltd Method and apparatus for controlling the growth of thin film during deposition process by measuring the rate of change of optical thickness of the thin-film
WO2003025496A3 (en) * 2001-09-14 2004-01-08 Qinetiq Ltd Optical method measuring thin film growth
US7236253B2 (en) 2001-09-14 2007-06-26 Qinetiq Limited Optical method measuring thin film growth
US7835018B2 (en) 2001-09-14 2010-11-16 Qinetiq Limited Optical method for controlling thin film growth

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