JPS5533055B2 - - Google Patents
Info
- Publication number
- JPS5533055B2 JPS5533055B2 JP8132275A JP8132275A JPS5533055B2 JP S5533055 B2 JPS5533055 B2 JP S5533055B2 JP 8132275 A JP8132275 A JP 8132275A JP 8132275 A JP8132275 A JP 8132275A JP S5533055 B2 JPS5533055 B2 JP S5533055B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Processes Of Treating Macromolecular Substances (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8132275A JPS524833A (en) | 1975-06-30 | 1975-06-30 | Manufacturing method of electron-beam exposure resist use high molecul ar materials |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8132275A JPS524833A (en) | 1975-06-30 | 1975-06-30 | Manufacturing method of electron-beam exposure resist use high molecul ar materials |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS524833A JPS524833A (en) | 1977-01-14 |
| JPS5533055B2 true JPS5533055B2 (enExample) | 1980-08-28 |
Family
ID=13743152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8132275A Granted JPS524833A (en) | 1975-06-30 | 1975-06-30 | Manufacturing method of electron-beam exposure resist use high molecul ar materials |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS524833A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5853576U (ja) * | 1981-10-07 | 1983-04-12 | ア−ス製薬株式会社 | 燻蒸器 |
| JPS61242534A (ja) * | 1985-04-13 | 1986-10-28 | ヘンケル・コマンデイ−トゲゼルシヤフト・アウフ・アクチエン | 殺虫有効成分の電気気化装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55105244A (en) * | 1979-02-06 | 1980-08-12 | Victor Co Of Japan Ltd | Electron beam resist |
| EP1122607A1 (en) * | 2000-02-07 | 2001-08-08 | Shipley Company LLC | High resolution photoresist compositions |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5234192B2 (enExample) * | 1972-09-12 | 1977-09-01 |
-
1975
- 1975-06-30 JP JP8132275A patent/JPS524833A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5853576U (ja) * | 1981-10-07 | 1983-04-12 | ア−ス製薬株式会社 | 燻蒸器 |
| JPS61242534A (ja) * | 1985-04-13 | 1986-10-28 | ヘンケル・コマンデイ−トゲゼルシヤフト・アウフ・アクチエン | 殺虫有効成分の電気気化装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS524833A (en) | 1977-01-14 |