JPS5532215B2 - - Google Patents
Info
- Publication number
- JPS5532215B2 JPS5532215B2 JP9323076A JP9323076A JPS5532215B2 JP S5532215 B2 JPS5532215 B2 JP S5532215B2 JP 9323076 A JP9323076 A JP 9323076A JP 9323076 A JP9323076 A JP 9323076A JP S5532215 B2 JPS5532215 B2 JP S5532215B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9323076A JPS5318969A (en) | 1976-08-06 | 1976-08-06 | Wafer fixing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9323076A JPS5318969A (en) | 1976-08-06 | 1976-08-06 | Wafer fixing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5318969A JPS5318969A (en) | 1978-02-21 |
| JPS5532215B2 true JPS5532215B2 (ja) | 1980-08-23 |
Family
ID=14076731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9323076A Granted JPS5318969A (en) | 1976-08-06 | 1976-08-06 | Wafer fixing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5318969A (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5599741A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Affixing method of article onto adhesive tape |
| JPS5759328A (en) * | 1980-09-27 | 1982-04-09 | Toshiba Corp | Method for fixed exfoliation of sample |
| US4412133A (en) * | 1982-01-05 | 1983-10-25 | The Perkin-Elmer Corp. | Electrostatic cassette |
| JPS59191344A (ja) * | 1983-04-14 | 1984-10-30 | Toshiba Corp | 薄板取着用治具 |
| JPS59192834U (ja) * | 1983-06-09 | 1984-12-21 | 富士通株式会社 | 基板保持構造 |
| JPH0715137Y2 (ja) * | 1989-06-30 | 1995-04-10 | ソニー株式会社 | ウエハー保持装置 |
-
1976
- 1976-08-06 JP JP9323076A patent/JPS5318969A/ja active Granted
Non-Patent Citations (3)
| Title |
|---|
| IBM TECHNICAL DISCLOSURE BULLETIN=1970 * |
| IBM TECHNICAL DISCLOSURE BULLETIN=1973 * |
| REV SCI INSTRUM=1973 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5318969A (en) | 1978-02-21 |