JPS5530294B2 - - Google Patents
Info
- Publication number
- JPS5530294B2 JPS5530294B2 JP11977075A JP11977075A JPS5530294B2 JP S5530294 B2 JPS5530294 B2 JP S5530294B2 JP 11977075 A JP11977075 A JP 11977075A JP 11977075 A JP11977075 A JP 11977075A JP S5530294 B2 JPS5530294 B2 JP S5530294B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P50/644—
-
- H10W15/00—
-
- H10W15/01—
Landscapes
- Weting (AREA)
- Element Separation (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50119770A JPS5244175A (en) | 1975-10-06 | 1975-10-06 | Method of flat etching of silicon substrate |
| NL7610970A NL7610970A (nl) | 1975-10-06 | 1976-10-04 | Werkwijze voor het vlakmaken van een silicium- substraat door etsen. |
| DE19762644940 DE2644940A1 (de) | 1975-10-06 | 1976-10-05 | Aetzverfahren zum abflachen eines siliciumsubstrats |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50119770A JPS5244175A (en) | 1975-10-06 | 1975-10-06 | Method of flat etching of silicon substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5244175A JPS5244175A (en) | 1977-04-06 |
| JPS5530294B2 true JPS5530294B2 (OSRAM) | 1980-08-09 |
Family
ID=14769758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50119770A Granted JPS5244175A (en) | 1975-10-06 | 1975-10-06 | Method of flat etching of silicon substrate |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5244175A (OSRAM) |
| DE (1) | DE2644940A1 (OSRAM) |
| NL (1) | NL7610970A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6272974U (OSRAM) * | 1985-10-28 | 1987-05-11 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4187125A (en) * | 1976-12-27 | 1980-02-05 | Raytheon Company | Method for manufacturing semiconductor structures by anisotropic and isotropic etching |
| US4278987A (en) * | 1977-10-17 | 1981-07-14 | Hitachi, Ltd. | Junction isolated IC with thick EPI portion having sides at least 20 degrees from (110) orientations |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58148131U (ja) * | 1982-03-30 | 1983-10-05 | 住金鋼材工業株式会社 | ブラケツト式サポ−ト足場 |
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1975
- 1975-10-06 JP JP50119770A patent/JPS5244175A/ja active Granted
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1976
- 1976-10-04 NL NL7610970A patent/NL7610970A/xx not_active Application Discontinuation
- 1976-10-05 DE DE19762644940 patent/DE2644940A1/de not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6272974U (OSRAM) * | 1985-10-28 | 1987-05-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2644940A1 (de) | 1977-04-28 |
| JPS5244175A (en) | 1977-04-06 |
| NL7610970A (nl) | 1977-04-12 |