JPS552990A - Method and device for measuring focal length of electronic lens of long focus - Google Patents

Method and device for measuring focal length of electronic lens of long focus

Info

Publication number
JPS552990A
JPS552990A JP7512379A JP7512379A JPS552990A JP S552990 A JPS552990 A JP S552990A JP 7512379 A JP7512379 A JP 7512379A JP 7512379 A JP7512379 A JP 7512379A JP S552990 A JPS552990 A JP S552990A
Authority
JP
Japan
Prior art keywords
focal length
long focus
electronic lens
measuring focal
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7512379A
Other languages
English (en)
Inventor
Angaa Kurausu
Furoojien Yurugen
Rishiyuke Burukuharuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS552990A publication Critical patent/JPS552990A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
JP7512379A 1978-06-16 1979-06-14 Method and device for measuring focal length of electronic lens of long focus Pending JPS552990A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2827085A DE2827085C2 (de) 1978-06-16 1978-06-16 Verfahren und Vorrichtung zur Brennweitenbestimmung langbrennweitiger elektronenoptischer Linsen

Publications (1)

Publication Number Publication Date
JPS552990A true JPS552990A (en) 1980-01-10

Family

ID=6042288

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7512379A Pending JPS552990A (en) 1978-06-16 1979-06-14 Method and device for measuring focal length of electronic lens of long focus

Country Status (4)

Country Link
US (1) US4246487A (ja)
EP (1) EP0006985B1 (ja)
JP (1) JPS552990A (ja)
DE (1) DE2827085C2 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT393925B (de) * 1987-06-02 1992-01-10 Ims Ionen Mikrofab Syst Anordnung zur durchfuehrung eines verfahrens zum positionieren der abbildung der auf einer maske befindlichen struktur auf ein substrat, und verfahren zum ausrichten von auf einer maske angeordneten markierungen auf markierungen, die auf einem traeger angeordnet sind
NL8702570A (nl) * 1987-10-29 1989-05-16 Philips Nv Geladen deeltjes bundel apparaat.
DE3825103A1 (de) * 1988-07-23 1990-01-25 Zeiss Carl Fa Verfahren zum beleuchten eines objektes in einem transmissions-elektronenmikroskop
JPH06215714A (ja) * 1992-06-05 1994-08-05 Hitachi Ltd 電界放出型透過電子顕微鏡
US6215587B1 (en) * 1994-02-14 2001-04-10 Robert R. Alfano Microscope imaging inside highly scattering media
US6441384B1 (en) * 1998-04-08 2002-08-27 Nikon Corporation Charged particle beam exposure device exhibiting reduced image blur

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2213208C3 (de) * 1972-03-16 1975-11-13 Max Planck Gesellschaft Rotationssymetrisches, sphärisch korrigiertes korpuskularstrahloptisches Abbildungssystem
DE2515549C2 (de) * 1975-04-09 1977-04-14 Siemens Ag Korpuskularstrahloptisches geraet zur abbildung einer maske auf ein zu bestrahlendes praeparat
DE2515550C2 (de) * 1975-04-09 1977-05-18 Siemens Ag Korpuskularstrahloptisches geraet zur abbildung einer maske auf ein zu bestrahlendes praeparat

Also Published As

Publication number Publication date
US4246487A (en) 1981-01-20
EP0006985A1 (de) 1980-01-23
EP0006985B1 (de) 1981-08-26
DE2827085B1 (de) 1979-11-08
DE2827085C2 (de) 1980-07-24

Similar Documents

Publication Publication Date Title
GB2022955A (en) Optical range and focus detection
JPS53124570A (en) Improved method and apparatus for molding optical plastic lens of standard and two focus point type
DE3071858D1 (en) Method and device for optical distance measurement
JPS54139724A (en) Device for focusing zoom lens
DK163193C (da) Fremgangsmaade og anordning ved maaling af afstanden til et objekt
JPS5510600A (en) Automatic detection of laser heat effect and device therefor
JPS5392671A (en) Particleeray optical device for compressing and focusing specimen on mask
JPS53123945A (en) Method of checking automatic focusing system of microscope and its apparatus
ES505077A0 (es) Un dispositivo enfocador optico
JPS56168140A (en) Digital method of and apparatus for automatically measuring refractive power at top of spectacles lens
JPS52130321A (en) Method and device for searching focused state of optical unit
DE3021887A1 (de) Fokussierverfahren und -vorrichtung an optischen systemen
JPS54139728A (en) Device for adjusting focus of camera
DE2963367D1 (en) Method and device for corpuscular-ray shadow-projection exposure
GB2040132B (en) Device for detecting the focus condition of an optical image
JPS5487222A (en) Device of detecting focus of camera
GB2069790B (en) Device and method for automatically focusing a lens of a camera or the like
JPS552990A (en) Method and device for measuring focal length of electronic lens of long focus
JPS52152728A (en) Method of lens and device for optical fiber
GB2086567B (en) Apparatus for photoelectric determinination of the position of the focal plane of an image
ES503348A0 (es) Un dispositivo de enfoque optico
JPS54113335A (en) Focus point regulating apparatus of camera
JPS55135473A (en) Method of reading solid image sensor and circuit device for executing same
JPS54153029A (en) Method of and device for automatically or semiiautomatically focusing
JPS5487526A (en) Optical and electronic focus adjusting device