JPS552715A - Coating method for base material surface with metallic nitride - Google Patents

Coating method for base material surface with metallic nitride

Info

Publication number
JPS552715A
JPS552715A JP7371478A JP7371478A JPS552715A JP S552715 A JPS552715 A JP S552715A JP 7371478 A JP7371478 A JP 7371478A JP 7371478 A JP7371478 A JP 7371478A JP S552715 A JPS552715 A JP S552715A
Authority
JP
Japan
Prior art keywords
base material
reaction chamber
vessel
reaction
tin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7371478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6224501B2 (enrdf_load_stackoverflow
Inventor
Akio Nishiyama
Noribumi Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP7371478A priority Critical patent/JPS552715A/ja
Publication of JPS552715A publication Critical patent/JPS552715A/ja
Publication of JPS6224501B2 publication Critical patent/JPS6224501B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using DC or AC discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Chemical Vapour Deposition (AREA)
JP7371478A 1978-06-20 1978-06-20 Coating method for base material surface with metallic nitride Granted JPS552715A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7371478A JPS552715A (en) 1978-06-20 1978-06-20 Coating method for base material surface with metallic nitride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7371478A JPS552715A (en) 1978-06-20 1978-06-20 Coating method for base material surface with metallic nitride

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP7471984A Division JPS6036665A (ja) 1984-04-13 1984-04-13 金属窒化物による基体表面被覆方法

Publications (2)

Publication Number Publication Date
JPS552715A true JPS552715A (en) 1980-01-10
JPS6224501B2 JPS6224501B2 (enrdf_load_stackoverflow) 1987-05-28

Family

ID=13526156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7371478A Granted JPS552715A (en) 1978-06-20 1978-06-20 Coating method for base material surface with metallic nitride

Country Status (1)

Country Link
JP (1) JPS552715A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4420498A (en) * 1981-06-26 1983-12-13 Tokyo Shibaura Denki Kabushiki Kaisha Method of forming a decorative metallic nitride coating
JPS62180900U (enrdf_load_stackoverflow) * 1986-05-09 1987-11-17
FR2726834A1 (fr) * 1994-11-07 1996-05-15 Neuville Stephane Procede de depot sur au moins une piece d'un revetement protecteur de grande durete
WO1996014448A1 (fr) * 1994-11-07 1996-05-17 Neuville Stephane Procede de depot d'un revetement protecteur de grande durete

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4420498A (en) * 1981-06-26 1983-12-13 Tokyo Shibaura Denki Kabushiki Kaisha Method of forming a decorative metallic nitride coating
JPS62180900U (enrdf_load_stackoverflow) * 1986-05-09 1987-11-17
FR2726834A1 (fr) * 1994-11-07 1996-05-15 Neuville Stephane Procede de depot sur au moins une piece d'un revetement protecteur de grande durete
WO1996014448A1 (fr) * 1994-11-07 1996-05-17 Neuville Stephane Procede de depot d'un revetement protecteur de grande durete
US5846613A (en) * 1994-11-07 1998-12-08 Neuville; Stephane Method for depositing a hard protective coating
CN1053931C (zh) * 1994-11-07 2000-06-28 S·纽维勒 淀积非常坚固的保护涂层的方法

Also Published As

Publication number Publication date
JPS6224501B2 (enrdf_load_stackoverflow) 1987-05-28

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