JPS5526190B2 - - Google Patents
Info
- Publication number
- JPS5526190B2 JPS5526190B2 JP3817276A JP3817276A JPS5526190B2 JP S5526190 B2 JPS5526190 B2 JP S5526190B2 JP 3817276 A JP3817276 A JP 3817276A JP 3817276 A JP3817276 A JP 3817276A JP S5526190 B2 JPS5526190 B2 JP S5526190B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Electrodes Of Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3817276A JPS52122236A (en) | 1976-04-07 | 1976-04-07 | Etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3817276A JPS52122236A (en) | 1976-04-07 | 1976-04-07 | Etching device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52122236A JPS52122236A (en) | 1977-10-14 |
| JPS5526190B2 true JPS5526190B2 (OSRAM) | 1980-07-11 |
Family
ID=12517962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3817276A Granted JPS52122236A (en) | 1976-04-07 | 1976-04-07 | Etching device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52122236A (OSRAM) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5539690A (en) * | 1978-09-14 | 1980-03-19 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Plasma etching device |
| JPS55154583A (en) * | 1979-05-21 | 1980-12-02 | Nippon Telegr & Teleph Corp <Ntt> | Etching processing apparatus |
| JPS598784Y2 (ja) * | 1979-07-12 | 1984-03-19 | セイレイ工業株式会社 | 麦混入玄米の選別装置 |
| JPS58168230A (ja) * | 1982-03-30 | 1983-10-04 | Fujitsu Ltd | マイクロ波プラズマ処理方法 |
| JPS61263125A (ja) * | 1985-05-15 | 1986-11-21 | Tokuda Seisakusho Ltd | ドライエツチング装置 |
| JP2846274B2 (ja) * | 1995-06-20 | 1999-01-13 | 芝浦メカトロニクス株式会社 | ドライエッチング装置 |
| JP6494443B2 (ja) * | 2015-06-15 | 2019-04-03 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS576691B2 (OSRAM) * | 1972-06-17 | 1982-02-06 |
-
1976
- 1976-04-07 JP JP3817276A patent/JPS52122236A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52122236A (en) | 1977-10-14 |