JPS5522140U - - Google Patents
Info
- Publication number
- JPS5522140U JPS5522140U JP10441178U JP10441178U JPS5522140U JP S5522140 U JPS5522140 U JP S5522140U JP 10441178 U JP10441178 U JP 10441178U JP 10441178 U JP10441178 U JP 10441178U JP S5522140 U JPS5522140 U JP S5522140U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978104411U JPS5742174Y2 (en) | 1978-07-28 | 1978-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978104411U JPS5742174Y2 (en) | 1978-07-28 | 1978-07-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5522140U true JPS5522140U (en) | 1980-02-13 |
| JPS5742174Y2 JPS5742174Y2 (en) | 1982-09-17 |
Family
ID=29045778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978104411U Expired JPS5742174Y2 (en) | 1978-07-28 | 1978-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5742174Y2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61107860U (en) * | 1984-12-19 | 1986-07-08 | ||
| JPS61215289A (en) * | 1985-03-19 | 1986-09-25 | Toshiba Mach Co Ltd | Vapor-phase growth apparatus |
| JPH01168030A (en) * | 1987-12-24 | 1989-07-03 | Touyoko Kagaku Kk | Low-pressure vapor growth method |
| JPH0245631U (en) * | 1988-09-24 | 1990-03-29 | ||
| WO2004093173A1 (en) * | 2003-04-14 | 2004-10-28 | Shin-Etsu Handotai Co. Ltd. | Susceptor and vapor growth device |
| JP2010245396A (en) * | 2009-04-08 | 2010-10-28 | Sumco Corp | Manufacturing method and laminating apparatus for soi wafer |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5012971A (en) * | 1973-06-04 | 1975-02-10 | ||
| JPS52146174A (en) * | 1976-05-29 | 1977-12-05 | Toshiba Corp | Susceptor for vapor growth of semiconductor |
| JPS5378765A (en) * | 1976-12-23 | 1978-07-12 | Toshiba Corp | Semiconductor wafer heating stand for gas phase growth |
-
1978
- 1978-07-28 JP JP1978104411U patent/JPS5742174Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5012971A (en) * | 1973-06-04 | 1975-02-10 | ||
| JPS52146174A (en) * | 1976-05-29 | 1977-12-05 | Toshiba Corp | Susceptor for vapor growth of semiconductor |
| JPS5378765A (en) * | 1976-12-23 | 1978-07-12 | Toshiba Corp | Semiconductor wafer heating stand for gas phase growth |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61107860U (en) * | 1984-12-19 | 1986-07-08 | ||
| JPH0323497Y2 (en) * | 1984-12-19 | 1991-05-22 | ||
| JPS61215289A (en) * | 1985-03-19 | 1986-09-25 | Toshiba Mach Co Ltd | Vapor-phase growth apparatus |
| JPH01168030A (en) * | 1987-12-24 | 1989-07-03 | Touyoko Kagaku Kk | Low-pressure vapor growth method |
| JPH0245631U (en) * | 1988-09-24 | 1990-03-29 | ||
| WO2004093173A1 (en) * | 2003-04-14 | 2004-10-28 | Shin-Etsu Handotai Co. Ltd. | Susceptor and vapor growth device |
| JP2010245396A (en) * | 2009-04-08 | 2010-10-28 | Sumco Corp | Manufacturing method and laminating apparatus for soi wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5742174Y2 (en) | 1982-09-17 |