JPS5742174Y2 - - Google Patents
Info
- Publication number
- JPS5742174Y2 JPS5742174Y2 JP1978104411U JP10441178U JPS5742174Y2 JP S5742174 Y2 JPS5742174 Y2 JP S5742174Y2 JP 1978104411 U JP1978104411 U JP 1978104411U JP 10441178 U JP10441178 U JP 10441178U JP S5742174 Y2 JPS5742174 Y2 JP S5742174Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978104411U JPS5742174Y2 (en) | 1978-07-28 | 1978-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978104411U JPS5742174Y2 (en) | 1978-07-28 | 1978-07-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5522140U JPS5522140U (en) | 1980-02-13 |
| JPS5742174Y2 true JPS5742174Y2 (en) | 1982-09-17 |
Family
ID=29045778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978104411U Expired JPS5742174Y2 (en) | 1978-07-28 | 1978-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5742174Y2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0323497Y2 (en) * | 1984-12-19 | 1991-05-22 | ||
| JPS61215289A (en) * | 1985-03-19 | 1986-09-25 | Toshiba Mach Co Ltd | Vapor-phase growth apparatus |
| JPH0727870B2 (en) * | 1987-12-24 | 1995-03-29 | 東横化学株式会社 | Low pressure vapor deposition method |
| JPH0713217Y2 (en) * | 1988-09-24 | 1995-03-29 | 株式会社リコー | Lower electrode of semiconductor manufacturing equipment |
| JP4019998B2 (en) * | 2003-04-14 | 2007-12-12 | 信越半導体株式会社 | Susceptor and vapor phase growth apparatus |
| JP5668275B2 (en) * | 2009-04-08 | 2015-02-12 | 株式会社Sumco | SOI wafer manufacturing method and bonding apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5012971A (en) * | 1973-06-04 | 1975-02-10 | ||
| JPS52146174A (en) * | 1976-05-29 | 1977-12-05 | Toshiba Corp | Susceptor for vapor growth of semiconductor |
| JPS5378765A (en) * | 1976-12-23 | 1978-07-12 | Toshiba Corp | Semiconductor wafer heating stand for gas phase growth |
-
1978
- 1978-07-28 JP JP1978104411U patent/JPS5742174Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5012971A (en) * | 1973-06-04 | 1975-02-10 | ||
| JPS52146174A (en) * | 1976-05-29 | 1977-12-05 | Toshiba Corp | Susceptor for vapor growth of semiconductor |
| JPS5378765A (en) * | 1976-12-23 | 1978-07-12 | Toshiba Corp | Semiconductor wafer heating stand for gas phase growth |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5522140U (en) | 1980-02-13 |