JPS5521193A - Wafer processing device - Google Patents
Wafer processing deviceInfo
- Publication number
- JPS5521193A JPS5521193A JP14416978A JP14416978A JPS5521193A JP S5521193 A JPS5521193 A JP S5521193A JP 14416978 A JP14416978 A JP 14416978A JP 14416978 A JP14416978 A JP 14416978A JP S5521193 A JPS5521193 A JP S5521193A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- plates
- sides
- processing device
- wafer processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To equally treat the both sides of a wafer with a wafer holder mechanism and a stirrer placed close to the both sides of said wafer to transfer through sliding relatively to wafer surface.
CONSTITUTION: A wafer holder plate 4 consists of two sector plates 4a and 4b placed one upon the other. A wafer W is fitted between the adjacent two sets of said plates 4 and 4 from sideward, and mutually-facing edge portions of said wafer W are sandwiched between the upper and lower plates of said sector plates 4 and 4 on the both sides. A liquid stirring plate 12 holds said holder plate 4 with upper and lower plates and transfers through sliding relatively to wafer surface W.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14416978A JPS5521193A (en) | 1978-11-24 | 1978-11-24 | Wafer processing device |
US06/061,049 US4282825A (en) | 1978-08-02 | 1979-07-26 | Surface treatment device |
DE19792931308 DE2931308A1 (en) | 1978-08-02 | 1979-08-01 | SURFACE TREATMENT DEVICE |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14416978A JPS5521193A (en) | 1978-11-24 | 1978-11-24 | Wafer processing device |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9359278A Division JPS5521119A (en) | 1978-08-02 | 1978-08-02 | Wafer continuously processing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5521193A true JPS5521193A (en) | 1980-02-15 |
Family
ID=15355796
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14416978A Pending JPS5521193A (en) | 1978-08-02 | 1978-11-24 | Wafer processing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5521193A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4857584A (en) * | 1971-11-20 | 1973-08-13 | ||
JPS5040946A (en) * | 1973-04-13 | 1975-04-15 | ||
JPS50145077A (en) * | 1974-05-10 | 1975-11-21 |
-
1978
- 1978-11-24 JP JP14416978A patent/JPS5521193A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4857584A (en) * | 1971-11-20 | 1973-08-13 | ||
JPS5040946A (en) * | 1973-04-13 | 1975-04-15 | ||
JPS50145077A (en) * | 1974-05-10 | 1975-11-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5394194A (en) | Substrate for photoelectric transducer | |
JPS5274580A (en) | Boat for vacuum evaporation | |
EP0012911A3 (en) | Device for the precise alignment of planar workpieces, e.g. semiconductor wafers | |
JPS5521193A (en) | Wafer processing device | |
JPS53111739A (en) | Flexible means for image forming device | |
JPS5369069A (en) | Warpage measuring device of base plates | |
JPS55101548A (en) | Apparatus for transferring plate material having indefinite shape | |
JPS52156551A (en) | Semiconductor wafer breaking method | |
JPS51125665A (en) | A fluid comtact arrangement | |
JPS5399553A (en) | Heat radiating body | |
JPS522164A (en) | Wafer cleaning and drying device | |
JPS5565446A (en) | Semiconductor device | |
JPS529134A (en) | High-frequency heating device | |
JPS5318968A (en) | Semiconductor wafer arraying device | |
JPS5251816A (en) | Solid pickup equipment | |
JPS523385A (en) | Semiconductor device | |
JPS54108166A (en) | Device for coupling sheet-like members | |
JPS5441667A (en) | Flat type semiconductor device | |
JPS5417669A (en) | Semiconductor device | |
JPS5419689A (en) | Construction of solar batteries | |
ES516301A0 (en) | "ELECTRIC COOKING APPARATUS, IN PARTICULAR COOKING PLATE OR COOKING SURFACE OF VITREO CERAMIC MATERIAL". | |
JPS5350682A (en) | Semiconductor device | |
JPS52139380A (en) | Thin plate supporting device | |
JPS5233258A (en) | Apparatus for pushing material on base plate | |
JPS52135281A (en) | Semiconductor device |