JPS5518076B2 - - Google Patents
Info
- Publication number
- JPS5518076B2 JPS5518076B2 JP7644174A JP7644174A JPS5518076B2 JP S5518076 B2 JPS5518076 B2 JP S5518076B2 JP 7644174 A JP7644174 A JP 7644174A JP 7644174 A JP7644174 A JP 7644174A JP S5518076 B2 JPS5518076 B2 JP S5518076B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7644174A JPS515568A (en) | 1974-07-05 | 1974-07-05 | Tasohaisenkairono seizohoho |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7644174A JPS515568A (en) | 1974-07-05 | 1974-07-05 | Tasohaisenkairono seizohoho |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS515568A JPS515568A (en) | 1976-01-17 |
JPS5518076B2 true JPS5518076B2 (en) | 1980-05-16 |
Family
ID=13605227
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7644174A Granted JPS515568A (en) | 1974-07-05 | 1974-07-05 | Tasohaisenkairono seizohoho |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS515568A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0126343B2 (en) * | 1981-09-30 | 1989-05-23 | Seiko Epson Corp |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5398788A (en) * | 1977-02-09 | 1978-08-29 | Oki Electric Ind Co Ltd | Manufacture for semiconductor integrated circuit |
JPS5766631A (en) * | 1980-10-13 | 1982-04-22 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
WO1992009102A1 (en) * | 1990-11-15 | 1992-05-29 | International Business Machines Corporation | A method of making a multilayer thin film structure |
JPH05343853A (en) * | 1992-06-09 | 1993-12-24 | Fujitsu Ltd | Formation through hole in multilayer insulating film |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48102983A (en) * | 1972-04-06 | 1973-12-24 |
-
1974
- 1974-07-05 JP JP7644174A patent/JPS515568A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48102983A (en) * | 1972-04-06 | 1973-12-24 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0126343B2 (en) * | 1981-09-30 | 1989-05-23 | Seiko Epson Corp |
Also Published As
Publication number | Publication date |
---|---|
JPS515568A (en) | 1976-01-17 |