JPS5518044B2 - - Google Patents
Info
- Publication number
- JPS5518044B2 JPS5518044B2 JP4427475A JP4427475A JPS5518044B2 JP S5518044 B2 JPS5518044 B2 JP S5518044B2 JP 4427475 A JP4427475 A JP 4427475A JP 4427475 A JP4427475 A JP 4427475A JP S5518044 B2 JPS5518044 B2 JP S5518044B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50044274A JPS51120178A (en) | 1975-04-14 | 1975-04-14 | Scanning type mask detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50044274A JPS51120178A (en) | 1975-04-14 | 1975-04-14 | Scanning type mask detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51120178A JPS51120178A (en) | 1976-10-21 |
| JPS5518044B2 true JPS5518044B2 (enExample) | 1980-05-16 |
Family
ID=12686918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50044274A Granted JPS51120178A (en) | 1975-04-14 | 1975-04-14 | Scanning type mask detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51120178A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53111280A (en) * | 1977-03-10 | 1978-09-28 | Canon Inc | Mask or wafer for production of semiconductor elements and device for aligning these |
| DE2822269C2 (de) * | 1978-05-22 | 1983-12-01 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur automatischen Ausrichtung von zwei aufeinander einzujustierenden Objekten |
| JPS54157478A (en) * | 1978-06-01 | 1979-12-12 | Canon Inc | Alignment method |
| JPS5534490A (en) * | 1978-09-01 | 1980-03-11 | Canon Inc | Alignment device |
-
1975
- 1975-04-14 JP JP50044274A patent/JPS51120178A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51120178A (en) | 1976-10-21 |