JPS5517102B2 - - Google Patents
Info
- Publication number
- JPS5517102B2 JPS5517102B2 JP9903072A JP9903072A JPS5517102B2 JP S5517102 B2 JPS5517102 B2 JP S5517102B2 JP 9903072 A JP9903072 A JP 9903072A JP 9903072 A JP9903072 A JP 9903072A JP S5517102 B2 JPS5517102 B2 JP S5517102B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9903072A JPS5517102B2 (en:Method) | 1972-10-04 | 1972-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9903072A JPS5517102B2 (en:Method) | 1972-10-04 | 1972-10-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4955574A JPS4955574A (en:Method) | 1974-05-29 |
| JPS5517102B2 true JPS5517102B2 (en:Method) | 1980-05-09 |
Family
ID=14235916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9903072A Expired JPS5517102B2 (en:Method) | 1972-10-04 | 1972-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5517102B2 (en:Method) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5072462A (en:Method) * | 1973-10-30 | 1975-06-16 | ||
| JPS5895818A (ja) * | 1981-12-02 | 1983-06-07 | Ushio Inc | 被膜形成方法 |
| JPS5939928U (ja) * | 1982-09-07 | 1984-03-14 | 東芝機械株式会社 | 化学気相成長装置 |
| JP2511668B2 (ja) * | 1987-03-19 | 1996-07-03 | 東京エレクトロン株式会社 | ベ−キング装置 |
| JPH0349250A (ja) * | 1989-07-17 | 1991-03-04 | Hitachi Ltd | 試料搬送容器および試料移送装置 |
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1972
- 1972-10-04 JP JP9903072A patent/JPS5517102B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4955574A (en:Method) | 1974-05-29 |