JPS5517102B2 - - Google Patents

Info

Publication number
JPS5517102B2
JPS5517102B2 JP9903072A JP9903072A JPS5517102B2 JP S5517102 B2 JPS5517102 B2 JP S5517102B2 JP 9903072 A JP9903072 A JP 9903072A JP 9903072 A JP9903072 A JP 9903072A JP S5517102 B2 JPS5517102 B2 JP S5517102B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9903072A
Other languages
Japanese (ja)
Other versions
JPS4955574A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9903072A priority Critical patent/JPS5517102B2/ja
Publication of JPS4955574A publication Critical patent/JPS4955574A/ja
Publication of JPS5517102B2 publication Critical patent/JPS5517102B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP9903072A 1972-10-04 1972-10-04 Expired JPS5517102B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9903072A JPS5517102B2 (enrdf_load_stackoverflow) 1972-10-04 1972-10-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9903072A JPS5517102B2 (enrdf_load_stackoverflow) 1972-10-04 1972-10-04

Publications (2)

Publication Number Publication Date
JPS4955574A JPS4955574A (enrdf_load_stackoverflow) 1974-05-29
JPS5517102B2 true JPS5517102B2 (enrdf_load_stackoverflow) 1980-05-09

Family

ID=14235916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9903072A Expired JPS5517102B2 (enrdf_load_stackoverflow) 1972-10-04 1972-10-04

Country Status (1)

Country Link
JP (1) JPS5517102B2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5072462A (enrdf_load_stackoverflow) * 1973-10-30 1975-06-16
JPS5895818A (ja) * 1981-12-02 1983-06-07 Ushio Inc 被膜形成方法
JPS5939928U (ja) * 1982-09-07 1984-03-14 東芝機械株式会社 化学気相成長装置
JP2511668B2 (ja) * 1987-03-19 1996-07-03 東京エレクトロン株式会社 ベ−キング装置
JPH0349250A (ja) * 1989-07-17 1991-03-04 Hitachi Ltd 試料搬送容器および試料移送装置

Also Published As

Publication number Publication date
JPS4955574A (enrdf_load_stackoverflow) 1974-05-29

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