JPS55166003A - Wafer scribe line detector - Google Patents
Wafer scribe line detectorInfo
- Publication number
- JPS55166003A JPS55166003A JP7299879A JP7299879A JPS55166003A JP S55166003 A JPS55166003 A JP S55166003A JP 7299879 A JP7299879 A JP 7299879A JP 7299879 A JP7299879 A JP 7299879A JP S55166003 A JPS55166003 A JP S55166003A
- Authority
- JP
- Japan
- Prior art keywords
- scattered light
- scribe line
- light
- wafer
- fluxes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Dicing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54072998A JPS6049241B2 (en) | 1979-06-12 | 1979-06-12 | Wafer scribe line detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54072998A JPS6049241B2 (en) | 1979-06-12 | 1979-06-12 | Wafer scribe line detection device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55166003A true JPS55166003A (en) | 1980-12-24 |
JPS6049241B2 JPS6049241B2 (en) | 1985-10-31 |
Family
ID=13505586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54072998A Expired JPS6049241B2 (en) | 1979-06-12 | 1979-06-12 | Wafer scribe line detection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6049241B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5788414A (en) * | 1980-11-21 | 1982-06-02 | Seiko Epson Corp | Alignment device |
JPS6054454A (en) * | 1983-09-05 | 1985-03-28 | Disco Abrasive Sys Ltd | Automatic precise positioning system |
-
1979
- 1979-06-12 JP JP54072998A patent/JPS6049241B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5788414A (en) * | 1980-11-21 | 1982-06-02 | Seiko Epson Corp | Alignment device |
JPS6054454A (en) * | 1983-09-05 | 1985-03-28 | Disco Abrasive Sys Ltd | Automatic precise positioning system |
Also Published As
Publication number | Publication date |
---|---|
JPS6049241B2 (en) | 1985-10-31 |
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