JPS5516452B2 - - Google Patents
Info
- Publication number
- JPS5516452B2 JPS5516452B2 JP6529974A JP6529974A JPS5516452B2 JP S5516452 B2 JPS5516452 B2 JP S5516452B2 JP 6529974 A JP6529974 A JP 6529974A JP 6529974 A JP6529974 A JP 6529974A JP S5516452 B2 JPS5516452 B2 JP S5516452B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6529974A JPS5516452B2 (https=) | 1974-06-07 | 1974-06-07 | |
| GB21146/75A GB1515571A (en) | 1974-05-23 | 1975-05-19 | Methods of growing thin epitaxial films on a crystal substrate |
| CA227,555A CA1011885A (en) | 1974-05-23 | 1975-05-22 | Molecular beam epitaxy method |
| FR7516116A FR2272488B1 (https=) | 1974-05-23 | 1975-05-23 | |
| DE2522921A DE2522921C3 (de) | 1974-05-23 | 1975-05-23 | Verfahren zur epitaktischen Abscheidung dotierter III-V-Verbindungshalbleiter-Schichten |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6529974A JPS5516452B2 (https=) | 1974-06-07 | 1974-06-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50157063A JPS50157063A (https=) | 1975-12-18 |
| JPS5516452B2 true JPS5516452B2 (https=) | 1980-05-02 |
Family
ID=13282889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6529974A Expired JPS5516452B2 (https=) | 1974-05-23 | 1974-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5516452B2 (https=) |
-
1974
- 1974-06-07 JP JP6529974A patent/JPS5516452B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50157063A (https=) | 1975-12-18 |