JPS5516452B2 - - Google Patents

Info

Publication number
JPS5516452B2
JPS5516452B2 JP6529974A JP6529974A JPS5516452B2 JP S5516452 B2 JPS5516452 B2 JP S5516452B2 JP 6529974 A JP6529974 A JP 6529974A JP 6529974 A JP6529974 A JP 6529974A JP S5516452 B2 JPS5516452 B2 JP S5516452B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6529974A
Other languages
Japanese (ja)
Other versions
JPS50157063A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6529974A priority Critical patent/JPS5516452B2/ja
Priority to GB21146/75A priority patent/GB1515571A/en
Priority to CA227,555A priority patent/CA1011885A/en
Priority to FR7516116A priority patent/FR2272488B1/fr
Priority to DE2522921A priority patent/DE2522921C3/de
Publication of JPS50157063A publication Critical patent/JPS50157063A/ja
Publication of JPS5516452B2 publication Critical patent/JPS5516452B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP6529974A 1974-05-23 1974-06-07 Expired JPS5516452B2 (enrdf_load_stackoverflow)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP6529974A JPS5516452B2 (enrdf_load_stackoverflow) 1974-06-07 1974-06-07
GB21146/75A GB1515571A (en) 1974-05-23 1975-05-19 Methods of growing thin epitaxial films on a crystal substrate
CA227,555A CA1011885A (en) 1974-05-23 1975-05-22 Molecular beam epitaxy method
FR7516116A FR2272488B1 (enrdf_load_stackoverflow) 1974-05-23 1975-05-23
DE2522921A DE2522921C3 (de) 1974-05-23 1975-05-23 Verfahren zur epitaktischen Abscheidung dotierter III-V-Verbindungshalbleiter-Schichten

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6529974A JPS5516452B2 (enrdf_load_stackoverflow) 1974-06-07 1974-06-07

Publications (2)

Publication Number Publication Date
JPS50157063A JPS50157063A (enrdf_load_stackoverflow) 1975-12-18
JPS5516452B2 true JPS5516452B2 (enrdf_load_stackoverflow) 1980-05-02

Family

ID=13282889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6529974A Expired JPS5516452B2 (enrdf_load_stackoverflow) 1974-05-23 1974-06-07

Country Status (1)

Country Link
JP (1) JPS5516452B2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS50157063A (enrdf_load_stackoverflow) 1975-12-18

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