JPS5516452B2 - - Google Patents

Info

Publication number
JPS5516452B2
JPS5516452B2 JP6529974A JP6529974A JPS5516452B2 JP S5516452 B2 JPS5516452 B2 JP S5516452B2 JP 6529974 A JP6529974 A JP 6529974A JP 6529974 A JP6529974 A JP 6529974A JP S5516452 B2 JPS5516452 B2 JP S5516452B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6529974A
Other languages
Japanese (ja)
Other versions
JPS50157063A (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6529974A priority Critical patent/JPS5516452B2/ja
Priority to GB21146/75A priority patent/GB1515571A/en
Priority to CA227,555A priority patent/CA1011885A/en
Priority to DE2522921A priority patent/DE2522921C3/de
Priority to FR7516116A priority patent/FR2272488B1/fr
Publication of JPS50157063A publication Critical patent/JPS50157063A/ja
Publication of JPS5516452B2 publication Critical patent/JPS5516452B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP6529974A 1974-05-23 1974-06-07 Expired JPS5516452B2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP6529974A JPS5516452B2 (de) 1974-06-07 1974-06-07
GB21146/75A GB1515571A (en) 1974-05-23 1975-05-19 Methods of growing thin epitaxial films on a crystal substrate
CA227,555A CA1011885A (en) 1974-05-23 1975-05-22 Molecular beam epitaxy method
DE2522921A DE2522921C3 (de) 1974-05-23 1975-05-23 Verfahren zur epitaktischen Abscheidung dotierter III-V-Verbindungshalbleiter-Schichten
FR7516116A FR2272488B1 (de) 1974-05-23 1975-05-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6529974A JPS5516452B2 (de) 1974-06-07 1974-06-07

Publications (2)

Publication Number Publication Date
JPS50157063A JPS50157063A (de) 1975-12-18
JPS5516452B2 true JPS5516452B2 (de) 1980-05-02

Family

ID=13282889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6529974A Expired JPS5516452B2 (de) 1974-05-23 1974-06-07

Country Status (1)

Country Link
JP (1) JPS5516452B2 (de)

Also Published As

Publication number Publication date
JPS50157063A (de) 1975-12-18

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