JPS55161343A - Permanent magnet electromagnetic lens - Google Patents

Permanent magnet electromagnetic lens

Info

Publication number
JPS55161343A
JPS55161343A JP6962879A JP6962879A JPS55161343A JP S55161343 A JPS55161343 A JP S55161343A JP 6962879 A JP6962879 A JP 6962879A JP 6962879 A JP6962879 A JP 6962879A JP S55161343 A JPS55161343 A JP S55161343A
Authority
JP
Japan
Prior art keywords
electromagnetic lens
temperature sensitive
moving mechanism
temperature
permanent magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6962879A
Other languages
English (en)
Inventor
Tatsuo Kamisaka
Takeo Fujimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6962879A priority Critical patent/JPS55161343A/ja
Publication of JPS55161343A publication Critical patent/JPS55161343A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/143—Permanent magnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
JP6962879A 1979-06-01 1979-06-01 Permanent magnet electromagnetic lens Pending JPS55161343A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6962879A JPS55161343A (en) 1979-06-01 1979-06-01 Permanent magnet electromagnetic lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6962879A JPS55161343A (en) 1979-06-01 1979-06-01 Permanent magnet electromagnetic lens

Publications (1)

Publication Number Publication Date
JPS55161343A true JPS55161343A (en) 1980-12-15

Family

ID=13408313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6962879A Pending JPS55161343A (en) 1979-06-01 1979-06-01 Permanent magnet electromagnetic lens

Country Status (1)

Country Link
JP (1) JPS55161343A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002518809A (ja) * 1998-06-19 2002-06-25 スプリオン リミテッド 荷電粒子に関する装置および方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002518809A (ja) * 1998-06-19 2002-06-25 スプリオン リミテッド 荷電粒子に関する装置および方法

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