JPS55157296A - Method of fabricating high density multilayer wiring substrate - Google Patents

Method of fabricating high density multilayer wiring substrate

Info

Publication number
JPS55157296A
JPS55157296A JP6547279A JP6547279A JPS55157296A JP S55157296 A JPS55157296 A JP S55157296A JP 6547279 A JP6547279 A JP 6547279A JP 6547279 A JP6547279 A JP 6547279A JP S55157296 A JPS55157296 A JP S55157296A
Authority
JP
Japan
Prior art keywords
high density
wiring substrate
multilayer wiring
fabricating high
density multilayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6547279A
Other languages
Japanese (ja)
Other versions
JPS6239560B2 (en
Inventor
Hikari Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP6547279A priority Critical patent/JPS55157296A/en
Publication of JPS55157296A publication Critical patent/JPS55157296A/en
Publication of JPS6239560B2 publication Critical patent/JPS6239560B2/ja
Granted legal-status Critical Current

Links

JP6547279A 1979-05-25 1979-05-25 Method of fabricating high density multilayer wiring substrate Granted JPS55157296A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6547279A JPS55157296A (en) 1979-05-25 1979-05-25 Method of fabricating high density multilayer wiring substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6547279A JPS55157296A (en) 1979-05-25 1979-05-25 Method of fabricating high density multilayer wiring substrate

Publications (2)

Publication Number Publication Date
JPS55157296A true JPS55157296A (en) 1980-12-06
JPS6239560B2 JPS6239560B2 (en) 1987-08-24

Family

ID=13288079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6547279A Granted JPS55157296A (en) 1979-05-25 1979-05-25 Method of fabricating high density multilayer wiring substrate

Country Status (1)

Country Link
JP (1) JPS55157296A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59151498A (en) * 1983-02-18 1984-08-29 日本電気株式会社 High density multilayer circuit board
JPS59151497A (en) * 1983-02-18 1984-08-29 日本電気株式会社 High density multilayer circuit board

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59151498A (en) * 1983-02-18 1984-08-29 日本電気株式会社 High density multilayer circuit board
JPS59151497A (en) * 1983-02-18 1984-08-29 日本電気株式会社 High density multilayer circuit board

Also Published As

Publication number Publication date
JPS6239560B2 (en) 1987-08-24

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