JPS55154654A - Pattern inspection system - Google Patents

Pattern inspection system

Info

Publication number
JPS55154654A
JPS55154654A JP6143979A JP6143979A JPS55154654A JP S55154654 A JPS55154654 A JP S55154654A JP 6143979 A JP6143979 A JP 6143979A JP 6143979 A JP6143979 A JP 6143979A JP S55154654 A JPS55154654 A JP S55154654A
Authority
JP
Japan
Prior art keywords
circuit
pattern
distribution
axis
discrimination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6143979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6312311B2 (enrdf_load_stackoverflow
Inventor
Toshimitsu Hamada
Hiroshi Makihira
Yasuo Nakagawa
Makoto Uko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NUCLEAR FUEL CO Ltd
Hitachi Ltd
Original Assignee
NUCLEAR FUEL CO Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NUCLEAR FUEL CO Ltd, Hitachi Ltd filed Critical NUCLEAR FUEL CO Ltd
Priority to JP6143979A priority Critical patent/JPS55154654A/ja
Publication of JPS55154654A publication Critical patent/JPS55154654A/ja
Publication of JPS6312311B2 publication Critical patent/JPS6312311B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Analysis (AREA)
JP6143979A 1979-05-21 1979-05-21 Pattern inspection system Granted JPS55154654A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6143979A JPS55154654A (en) 1979-05-21 1979-05-21 Pattern inspection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6143979A JPS55154654A (en) 1979-05-21 1979-05-21 Pattern inspection system

Publications (2)

Publication Number Publication Date
JPS55154654A true JPS55154654A (en) 1980-12-02
JPS6312311B2 JPS6312311B2 (enrdf_load_stackoverflow) 1988-03-18

Family

ID=13171094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6143979A Granted JPS55154654A (en) 1979-05-21 1979-05-21 Pattern inspection system

Country Status (1)

Country Link
JP (1) JPS55154654A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5835677A (ja) * 1981-08-26 1983-03-02 Stanley Electric Co Ltd パタ−ン情報処理方法
JPS5862766A (ja) * 1981-10-12 1983-04-14 Matsushita Electric Ind Co Ltd 投影演算装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5835677A (ja) * 1981-08-26 1983-03-02 Stanley Electric Co Ltd パタ−ン情報処理方法
JPS5862766A (ja) * 1981-10-12 1983-04-14 Matsushita Electric Ind Co Ltd 投影演算装置

Also Published As

Publication number Publication date
JPS6312311B2 (enrdf_load_stackoverflow) 1988-03-18

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