JPS55154399A - Liquid epitaxial growing method - Google Patents

Liquid epitaxial growing method

Info

Publication number
JPS55154399A
JPS55154399A JP6182979A JP6182979A JPS55154399A JP S55154399 A JPS55154399 A JP S55154399A JP 6182979 A JP6182979 A JP 6182979A JP 6182979 A JP6182979 A JP 6182979A JP S55154399 A JPS55154399 A JP S55154399A
Authority
JP
Japan
Prior art keywords
solution
epitaxial layer
impurity
gas
evaporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6182979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6353158B2 (enrdf_load_stackoverflow
Inventor
Morio Inoue
Tamotsu Uragaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6182979A priority Critical patent/JPS55154399A/ja
Publication of JPS55154399A publication Critical patent/JPS55154399A/ja
Publication of JPS6353158B2 publication Critical patent/JPS6353158B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP6182979A 1979-05-18 1979-05-18 Liquid epitaxial growing method Granted JPS55154399A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6182979A JPS55154399A (en) 1979-05-18 1979-05-18 Liquid epitaxial growing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6182979A JPS55154399A (en) 1979-05-18 1979-05-18 Liquid epitaxial growing method

Publications (2)

Publication Number Publication Date
JPS55154399A true JPS55154399A (en) 1980-12-01
JPS6353158B2 JPS6353158B2 (enrdf_load_stackoverflow) 1988-10-21

Family

ID=13182368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6182979A Granted JPS55154399A (en) 1979-05-18 1979-05-18 Liquid epitaxial growing method

Country Status (1)

Country Link
JP (1) JPS55154399A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6353158B2 (enrdf_load_stackoverflow) 1988-10-21

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