JPS55152172A - Chemical deposition device, insertion and takeout of material to be heated - Google Patents

Chemical deposition device, insertion and takeout of material to be heated

Info

Publication number
JPS55152172A
JPS55152172A JP6012679A JP6012679A JPS55152172A JP S55152172 A JPS55152172 A JP S55152172A JP 6012679 A JP6012679 A JP 6012679A JP 6012679 A JP6012679 A JP 6012679A JP S55152172 A JPS55152172 A JP S55152172A
Authority
JP
Japan
Prior art keywords
furnace
bench
moved
heated
wheels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6012679A
Other languages
English (en)
Other versions
JPS5937747B2 (ja
Inventor
Itaru Yamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP6012679A priority Critical patent/JPS5937747B2/ja
Publication of JPS55152172A publication Critical patent/JPS55152172A/ja
Publication of JPS5937747B2 publication Critical patent/JPS5937747B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP6012679A 1979-05-15 1979-05-15 化学蒸着装置および加熱材の插入ならびに取出方法 Expired JPS5937747B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6012679A JPS5937747B2 (ja) 1979-05-15 1979-05-15 化学蒸着装置および加熱材の插入ならびに取出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6012679A JPS5937747B2 (ja) 1979-05-15 1979-05-15 化学蒸着装置および加熱材の插入ならびに取出方法

Publications (2)

Publication Number Publication Date
JPS55152172A true JPS55152172A (en) 1980-11-27
JPS5937747B2 JPS5937747B2 (ja) 1984-09-11

Family

ID=13133118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6012679A Expired JPS5937747B2 (ja) 1979-05-15 1979-05-15 化学蒸着装置および加熱材の插入ならびに取出方法

Country Status (1)

Country Link
JP (1) JPS5937747B2 (ja)

Also Published As

Publication number Publication date
JPS5937747B2 (ja) 1984-09-11

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