JPS5343297A - Device for grinding both surfaces - Google Patents

Device for grinding both surfaces

Info

Publication number
JPS5343297A
JPS5343297A JP11817676A JP11817676A JPS5343297A JP S5343297 A JPS5343297 A JP S5343297A JP 11817676 A JP11817676 A JP 11817676A JP 11817676 A JP11817676 A JP 11817676A JP S5343297 A JPS5343297 A JP S5343297A
Authority
JP
Japan
Prior art keywords
grinding
carrier
impart
slide
ground
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11817676A
Other languages
Japanese (ja)
Inventor
Michio Ishikawa
Yasuo Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP11817676A priority Critical patent/JPS5343297A/en
Publication of JPS5343297A publication Critical patent/JPS5343297A/en
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PURPOSE: To impart an eccentric circular motion to a carrier relative to upper and lower grinding dishes so as to slide and process specimens to be ground which are inserted in the carrier to a uniform thickness.
COPYRIGHT: (C)1978,JPO&Japio
JP11817676A 1976-09-30 1976-09-30 Device for grinding both surfaces Pending JPS5343297A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11817676A JPS5343297A (en) 1976-09-30 1976-09-30 Device for grinding both surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11817676A JPS5343297A (en) 1976-09-30 1976-09-30 Device for grinding both surfaces

Publications (1)

Publication Number Publication Date
JPS5343297A true JPS5343297A (en) 1978-04-19

Family

ID=14730000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11817676A Pending JPS5343297A (en) 1976-09-30 1976-09-30 Device for grinding both surfaces

Country Status (1)

Country Link
JP (1) JPS5343297A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0549253U (en) * 1991-11-29 1993-06-29 三菱マテリアル株式会社 Semiconductor wafer polishing machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0549253U (en) * 1991-11-29 1993-06-29 三菱マテリアル株式会社 Semiconductor wafer polishing machine

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