JPS55151417A - Arranging device for laminar member - Google Patents

Arranging device for laminar member

Info

Publication number
JPS55151417A
JPS55151417A JP5894479A JP5894479A JPS55151417A JP S55151417 A JPS55151417 A JP S55151417A JP 5894479 A JP5894479 A JP 5894479A JP 5894479 A JP5894479 A JP 5894479A JP S55151417 A JPS55151417 A JP S55151417A
Authority
JP
Japan
Prior art keywords
wafer
over
turning
roll
stopper pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5894479A
Other languages
Japanese (ja)
Other versions
JPS5932368B2 (en
Inventor
Seiji Imanaka
Hiromichi Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5894479A priority Critical patent/JPS5932368B2/en
Publication of JPS55151417A publication Critical patent/JPS55151417A/en
Publication of JPS5932368B2 publication Critical patent/JPS5932368B2/en
Expired legal-status Critical Current

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Abstract

PURPOSE: To enable storing of wafers in an arranging jig with the surface and the reverse side thereof turned alternately, by a mechanism wherein a turning-over member is located in the middle of a guide member which guides the wafers, stored with the surface and the reverse side pointing to their respective given directions, to the arranging jig from a cassette side.
CONSTITUTION: When a raising and lowering mechanism 11 is raised, the forwardmost wafer 5 in a cassette 3 starts to roll downward along a slope of a guide member 9 when it reaches upmost portion of a rising position. The wafer reaching a turning-over member 13 is once stopped rolling by means of a stopper pin 15, and a stopper pin 16 also projects. The surface and the reverse side of the wafer 5 are turned over to their respective opposite sides with a turning-over mechanism 14 actuated, and the wafer 5 makes contact with a guide roll 19 resulting from drawing-in of the stopper pin 16. When a reciprocating mechanism 24 functions, the wafer 5, supported by the guide roll 19, simultaneously starts to roll again. It is then transferred onto a diffusion boat 1, and is then supported upright between fine grooves 2a and 2b. A subsequent wafer is supported upright on the diffusion boat 1 after being transferred thereto without being turned over.
COPYRIGHT: (C)1980,JPO&Japio
JP5894479A 1979-05-11 1979-05-11 Alignment device for plate-shaped members Expired JPS5932368B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5894479A JPS5932368B2 (en) 1979-05-11 1979-05-11 Alignment device for plate-shaped members

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5894479A JPS5932368B2 (en) 1979-05-11 1979-05-11 Alignment device for plate-shaped members

Publications (2)

Publication Number Publication Date
JPS55151417A true JPS55151417A (en) 1980-11-26
JPS5932368B2 JPS5932368B2 (en) 1984-08-08

Family

ID=13098932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5894479A Expired JPS5932368B2 (en) 1979-05-11 1979-05-11 Alignment device for plate-shaped members

Country Status (1)

Country Link
JP (1) JPS5932368B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169889U (en) * 1982-05-10 1983-11-12 曲田　政司 Multi-tier clothes drying equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169889U (en) * 1982-05-10 1983-11-12 曲田　政司 Multi-tier clothes drying equipment

Also Published As

Publication number Publication date
JPS5932368B2 (en) 1984-08-08

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