JPS55146927A - Film forming device - Google Patents

Film forming device

Info

Publication number
JPS55146927A
JPS55146927A JP5476479A JP5476479A JPS55146927A JP S55146927 A JPS55146927 A JP S55146927A JP 5476479 A JP5476479 A JP 5476479A JP 5476479 A JP5476479 A JP 5476479A JP S55146927 A JPS55146927 A JP S55146927A
Authority
JP
Japan
Prior art keywords
work
evaporating
varies
roller
rotates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5476479A
Other languages
Japanese (ja)
Inventor
Kyoyu Sasanuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP5476479A priority Critical patent/JPS55146927A/en
Publication of JPS55146927A publication Critical patent/JPS55146927A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE:To form uniform film on work, by rotating a member supported onto a conveying member by motion of endless conveying member. CONSTITUTION:In a vacuum tank 11 in which Ar is introduced, sprocket 22 is rotated to shift hollow pin chain 23. At this time, roller 24 rotates while shifting in contact with rail 26. As supporting member 25 which is connected to the roller 24 also rotates, incoming angle of steam from an evaporating material 15 of a work 18 held on a member 25 varies within a 0-360 deg. range, and relative position also varies. In this condition, DC voltage 27 is impressed with an evaporating source as positive pole and a jig table 16 as negative pole, respectively. By cleaning the surface by electric discharge at first, displacing it with Ar and keeping it at a prescribed vacuum, and allowing the evaporating material 15 to evaporate from the evaporating source 14, a uniform film can be formed on an entire surface of the work by thus evaporated material.
JP5476479A 1979-05-07 1979-05-07 Film forming device Pending JPS55146927A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5476479A JPS55146927A (en) 1979-05-07 1979-05-07 Film forming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5476479A JPS55146927A (en) 1979-05-07 1979-05-07 Film forming device

Publications (1)

Publication Number Publication Date
JPS55146927A true JPS55146927A (en) 1980-11-15

Family

ID=12979832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5476479A Pending JPS55146927A (en) 1979-05-07 1979-05-07 Film forming device

Country Status (1)

Country Link
JP (1) JPS55146927A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57111298A (en) * 1980-12-29 1982-07-10 Fujitsu Ltd Growth of compound semiconductor layer and its device
JPS5818982A (en) * 1981-07-27 1983-02-03 Nec Corp Formation of thin film by evaporation and evaporated thin film forming device
JPS6033350A (en) * 1983-08-03 1985-02-20 Citizen Watch Co Ltd Vacuum film forming apparatus
JPS6298740A (en) * 1985-10-25 1987-05-08 Tokyo Electron Ltd Dust preventing system of rotary mechanism

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979783A (en) * 1972-12-08 1974-08-01
JPS52115185A (en) * 1976-03-24 1977-09-27 Hitachi Ltd Vapor phase growing apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979783A (en) * 1972-12-08 1974-08-01
JPS52115185A (en) * 1976-03-24 1977-09-27 Hitachi Ltd Vapor phase growing apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57111298A (en) * 1980-12-29 1982-07-10 Fujitsu Ltd Growth of compound semiconductor layer and its device
JPS5818982A (en) * 1981-07-27 1983-02-03 Nec Corp Formation of thin film by evaporation and evaporated thin film forming device
JPH0363231B2 (en) * 1981-07-27 1991-09-30 Nippon Electric Co
JPS6033350A (en) * 1983-08-03 1985-02-20 Citizen Watch Co Ltd Vacuum film forming apparatus
JPS6298740A (en) * 1985-10-25 1987-05-08 Tokyo Electron Ltd Dust preventing system of rotary mechanism
JPH0574938B2 (en) * 1985-10-25 1993-10-19 Tokyo Electron Ltd

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