JPS55145174A - Etching method of amorphous alloy material - Google Patents
Etching method of amorphous alloy materialInfo
- Publication number
- JPS55145174A JPS55145174A JP5183479A JP5183479A JPS55145174A JP S55145174 A JPS55145174 A JP S55145174A JP 5183479 A JP5183479 A JP 5183479A JP 5183479 A JP5183479 A JP 5183479A JP S55145174 A JPS55145174 A JP S55145174A
- Authority
- JP
- Japan
- Prior art keywords
- alloy material
- amorphous alloy
- etching
- etching method
- pretreatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000956 alloy Substances 0.000 title abstract 5
- 229910000808 amorphous metal alloy Inorganic materials 0.000 title abstract 4
- 238000005530 etching Methods 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 4
- 238000002425 crystallisation Methods 0.000 abstract 3
- 230000008025 crystallization Effects 0.000 abstract 3
- 239000011810 insulating material Substances 0.000 abstract 1
- 230000000873 masking effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 230000000704 physical effect Effects 0.000 abstract 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5183479A JPS55145174A (en) | 1979-04-26 | 1979-04-26 | Etching method of amorphous alloy material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5183479A JPS55145174A (en) | 1979-04-26 | 1979-04-26 | Etching method of amorphous alloy material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55145174A true JPS55145174A (en) | 1980-11-12 |
| JPS6212308B2 JPS6212308B2 (OSRAM) | 1987-03-18 |
Family
ID=12897884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5183479A Granted JPS55145174A (en) | 1979-04-26 | 1979-04-26 | Etching method of amorphous alloy material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55145174A (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61189930A (ja) * | 1985-02-19 | 1986-08-23 | トッパン・ムーア株式会社 | 積層コア材 |
| JP2013118407A (ja) * | 2013-03-06 | 2013-06-13 | Renesas Electronics Corp | 半導体装置の製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5190944A (ja) * | 1975-02-07 | 1976-08-10 | Hishoshitsukarukogenaidohakumakuomochiirufuotoetsuchingunohoho |
-
1979
- 1979-04-26 JP JP5183479A patent/JPS55145174A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5190944A (ja) * | 1975-02-07 | 1976-08-10 | Hishoshitsukarukogenaidohakumakuomochiirufuotoetsuchingunohoho |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61189930A (ja) * | 1985-02-19 | 1986-08-23 | トッパン・ムーア株式会社 | 積層コア材 |
| JP2013118407A (ja) * | 2013-03-06 | 2013-06-13 | Renesas Electronics Corp | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6212308B2 (OSRAM) | 1987-03-18 |
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