JPS5513411A - Control method for flow controller - Google Patents
Control method for flow controllerInfo
- Publication number
- JPS5513411A JPS5513411A JP8396778A JP8396778A JPS5513411A JP S5513411 A JPS5513411 A JP S5513411A JP 8396778 A JP8396778 A JP 8396778A JP 8396778 A JP8396778 A JP 8396778A JP S5513411 A JPS5513411 A JP S5513411A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- valve
- flow
- inlet
- control valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Flow Control (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8396778A JPS5513411A (en) | 1978-07-12 | 1978-07-12 | Control method for flow controller |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8396778A JPS5513411A (en) | 1978-07-12 | 1978-07-12 | Control method for flow controller |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5513411A true JPS5513411A (en) | 1980-01-30 |
Family
ID=13817309
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8396778A Pending JPS5513411A (en) | 1978-07-12 | 1978-07-12 | Control method for flow controller |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5513411A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5958287A (ja) * | 1982-09-27 | 1984-04-03 | Fujitsu Ltd | バルブ制御方法 |
JP2000122725A (ja) * | 1998-10-19 | 2000-04-28 | Ckd Corp | ガス供給制御装置 |
CN102770697A (zh) * | 2010-01-26 | 2012-11-07 | 株式会社富士金 | 流体控制器及流量控制装置 |
-
1978
- 1978-07-12 JP JP8396778A patent/JPS5513411A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5958287A (ja) * | 1982-09-27 | 1984-04-03 | Fujitsu Ltd | バルブ制御方法 |
JP2000122725A (ja) * | 1998-10-19 | 2000-04-28 | Ckd Corp | ガス供給制御装置 |
CN102770697A (zh) * | 2010-01-26 | 2012-11-07 | 株式会社富士金 | 流体控制器及流量控制装置 |
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