JPS55130815A - Producing boron structural material - Google Patents

Producing boron structural material

Info

Publication number
JPS55130815A
JPS55130815A JP3816579A JP3816579A JPS55130815A JP S55130815 A JPS55130815 A JP S55130815A JP 3816579 A JP3816579 A JP 3816579A JP 3816579 A JP3816579 A JP 3816579A JP S55130815 A JPS55130815 A JP S55130815A
Authority
JP
Japan
Prior art keywords
substrate
boron
structural material
layer
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3816579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141844B2 (enExample
Inventor
Masaki Aoki
Shigeru Yoshida
Hiroshi Yamazoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3816579A priority Critical patent/JPS55130815A/ja
Publication of JPS55130815A publication Critical patent/JPS55130815A/ja
Publication of JPS6141844B2 publication Critical patent/JPS6141844B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
JP3816579A 1979-03-29 1979-03-29 Producing boron structural material Granted JPS55130815A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3816579A JPS55130815A (en) 1979-03-29 1979-03-29 Producing boron structural material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3816579A JPS55130815A (en) 1979-03-29 1979-03-29 Producing boron structural material

Publications (2)

Publication Number Publication Date
JPS55130815A true JPS55130815A (en) 1980-10-11
JPS6141844B2 JPS6141844B2 (enExample) 1986-09-18

Family

ID=12517779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3816579A Granted JPS55130815A (en) 1979-03-29 1979-03-29 Producing boron structural material

Country Status (1)

Country Link
JP (1) JPS55130815A (enExample)

Also Published As

Publication number Publication date
JPS6141844B2 (enExample) 1986-09-18

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