JPS5512732A - Sputtering apparatus for making thin magnetic film - Google Patents

Sputtering apparatus for making thin magnetic film

Info

Publication number
JPS5512732A
JPS5512732A JP8522978A JP8522978A JPS5512732A JP S5512732 A JPS5512732 A JP S5512732A JP 8522978 A JP8522978 A JP 8522978A JP 8522978 A JP8522978 A JP 8522978A JP S5512732 A JPS5512732 A JP S5512732A
Authority
JP
Japan
Prior art keywords
target
chrome
making
cobalt
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8522978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6151410B2 (enrdf_load_stackoverflow
Inventor
Hidefumi Funaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP8522978A priority Critical patent/JPS5512732A/ja
Publication of JPS5512732A publication Critical patent/JPS5512732A/ja
Publication of JPS6151410B2 publication Critical patent/JPS6151410B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP8522978A 1978-07-14 1978-07-14 Sputtering apparatus for making thin magnetic film Granted JPS5512732A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8522978A JPS5512732A (en) 1978-07-14 1978-07-14 Sputtering apparatus for making thin magnetic film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8522978A JPS5512732A (en) 1978-07-14 1978-07-14 Sputtering apparatus for making thin magnetic film

Publications (2)

Publication Number Publication Date
JPS5512732A true JPS5512732A (en) 1980-01-29
JPS6151410B2 JPS6151410B2 (enrdf_load_stackoverflow) 1986-11-08

Family

ID=13852729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8522978A Granted JPS5512732A (en) 1978-07-14 1978-07-14 Sputtering apparatus for making thin magnetic film

Country Status (1)

Country Link
JP (1) JPS5512732A (enrdf_load_stackoverflow)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5734324A (en) * 1980-08-08 1982-02-24 Teijin Ltd Manufacture of vertically magnetized film
JPS57157511A (en) * 1981-03-24 1982-09-29 Teijin Ltd Opposite target type sputtering device
JPS59190364A (ja) * 1984-03-23 1984-10-29 Hitachi Ltd スパツタリング装置
JPS60182712A (ja) * 1984-02-29 1985-09-18 Anelva Corp 強磁性体タ−ゲツト
US4626336A (en) * 1985-05-02 1986-12-02 Hewlett Packard Company Target for sputter depositing thin films
US4834855A (en) * 1985-05-02 1989-05-30 Hewlett-Packard Company Method for sputter depositing thin films
US5458759A (en) * 1991-08-02 1995-10-17 Anelva Corporation Magnetron sputtering cathode apparatus
US5464518A (en) * 1993-01-15 1995-11-07 The Boc Group, Inc. Cylindrical magnetron shield structure
US5470452A (en) * 1990-08-10 1995-11-28 Viratec Thin Films, Inc. Shielding for arc suppression in rotating magnetron sputtering systems
US5527439A (en) * 1995-01-23 1996-06-18 The Boc Group, Inc. Cylindrical magnetron shield structure

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5734324A (en) * 1980-08-08 1982-02-24 Teijin Ltd Manufacture of vertically magnetized film
JPS57157511A (en) * 1981-03-24 1982-09-29 Teijin Ltd Opposite target type sputtering device
JPS60182712A (ja) * 1984-02-29 1985-09-18 Anelva Corp 強磁性体タ−ゲツト
JPS59190364A (ja) * 1984-03-23 1984-10-29 Hitachi Ltd スパツタリング装置
US4626336A (en) * 1985-05-02 1986-12-02 Hewlett Packard Company Target for sputter depositing thin films
US4834855A (en) * 1985-05-02 1989-05-30 Hewlett-Packard Company Method for sputter depositing thin films
US5470452A (en) * 1990-08-10 1995-11-28 Viratec Thin Films, Inc. Shielding for arc suppression in rotating magnetron sputtering systems
US5725746A (en) * 1990-08-10 1998-03-10 Viratec Thin Films, Inc. Shielding for arc suppression in rotating magnetron sputtering systems
US5458759A (en) * 1991-08-02 1995-10-17 Anelva Corporation Magnetron sputtering cathode apparatus
US5464518A (en) * 1993-01-15 1995-11-07 The Boc Group, Inc. Cylindrical magnetron shield structure
US5527439A (en) * 1995-01-23 1996-06-18 The Boc Group, Inc. Cylindrical magnetron shield structure

Also Published As

Publication number Publication date
JPS6151410B2 (enrdf_load_stackoverflow) 1986-11-08

Similar Documents

Publication Publication Date Title
JPS5512732A (en) Sputtering apparatus for making thin magnetic film
JPS51126752A (en) Magnetron
JPS52109191A (en) Permanent magnet
JPS5361329A (en) Electromagnetic mechanism for camera release
JPS5370310A (en) Moving coil type motors
JPS53147217A (en) Cylindrical shape field magnet for small direct current motor
JPS57159025A (en) Method and device for dry etching
JPS5250507A (en) Magnetic rotor
JPS5780713A (en) Manufacture of magnetic thin film by sputtering
JPS5296923A (en) Permanent magnet alloy
JPS55136961A (en) Moving coil type device
JPS5346615A (en) Dc linear motor
JPS57118619A (en) High speed sputtering device for ferromagnetic material
GB1219450A (en) Permanent magnetic mounting device
JPS5299764A (en) Magnetic field type electron lens
JPS5613705A (en) Magnetic circuit using anisotropic magnet
JPS5263709A (en) Film magnetic head of magnetic resistance effective type
JPS57199728A (en) Parts feeder
JPS5427998A (en) Magnet device
JPS51130897A (en) Manufacturing method of permanent magnet having magnetic unisotropy
JPS5517934A (en) Magnetron
JPS53100415A (en) Rotor having a permanent magnet
JPS561758A (en) Stator for small-sized motor
JPS5644870A (en) Magnetic sensor
JPS5348659A (en) Magnetron unit