JPS55126948A - X-ray generator - Google Patents

X-ray generator

Info

Publication number
JPS55126948A
JPS55126948A JP3416279A JP3416279A JPS55126948A JP S55126948 A JPS55126948 A JP S55126948A JP 3416279 A JP3416279 A JP 3416279A JP 3416279 A JP3416279 A JP 3416279A JP S55126948 A JPS55126948 A JP S55126948A
Authority
JP
Japan
Prior art keywords
axis
housing
rotation
vacuum chamber
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3416279A
Other languages
English (en)
Inventor
Takashi Uchiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3416279A priority Critical patent/JPS55126948A/ja
Publication of JPS55126948A publication Critical patent/JPS55126948A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP3416279A 1979-03-23 1979-03-23 X-ray generator Pending JPS55126948A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3416279A JPS55126948A (en) 1979-03-23 1979-03-23 X-ray generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3416279A JPS55126948A (en) 1979-03-23 1979-03-23 X-ray generator

Publications (1)

Publication Number Publication Date
JPS55126948A true JPS55126948A (en) 1980-10-01

Family

ID=12406500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3416279A Pending JPS55126948A (en) 1979-03-23 1979-03-23 X-ray generator

Country Status (1)

Country Link
JP (1) JPS55126948A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62283537A (ja) * 1986-05-31 1987-12-09 Fujitsu Ltd 回転陽極ｘ線発生装置
US6249569B1 (en) * 1998-12-22 2001-06-19 General Electric Company X-ray tube having increased cooling capabilities
CN113709957A (zh) * 2021-08-27 2021-11-26 泛华检测技术有限公司 一种小型高能x射线装置及方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62283537A (ja) * 1986-05-31 1987-12-09 Fujitsu Ltd 回転陽極ｘ線発生装置
US6249569B1 (en) * 1998-12-22 2001-06-19 General Electric Company X-ray tube having increased cooling capabilities
US6496564B2 (en) * 1998-12-22 2002-12-17 General Electric Company X-ray tube having increased cooling capabilities
CN113709957A (zh) * 2021-08-27 2021-11-26 泛华检测技术有限公司 一种小型高能x射线装置及方法
CN113709957B (zh) * 2021-08-27 2022-04-01 泛华检测技术有限公司 一种小型高能x射线装置及方法

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