JPS55122869A - Coating method for hafnium carbide (hfc) - Google Patents
Coating method for hafnium carbide (hfc)Info
- Publication number
- JPS55122869A JPS55122869A JP2919379A JP2919379A JPS55122869A JP S55122869 A JPS55122869 A JP S55122869A JP 2919379 A JP2919379 A JP 2919379A JP 2919379 A JP2919379 A JP 2919379A JP S55122869 A JPS55122869 A JP S55122869A
- Authority
- JP
- Japan
- Prior art keywords
- hfc
- substrate
- heated
- iodide
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To form a dense and abrasion-resisting HfC coating, by forming Hf iodide by reacting I2 with Hf in the same reaction system and moreover, heating at a low temperature after forming HfC by passing a mixed gas introduced a hydrocarbon through a heated substrate. CONSTITUTION:The WC substrate 6 is put in the reaction vessel 1 heated by the electric furnace 2 and the Hf 8 is put in the Hf vessel 9. Next, the I2 10 is introduced into the dry ice box 11 and Hf iodide is formed by reacting the I2 10 with the Hf 8 after reducing the pressure in the vessel 1. Then, hydrocarbon, such as C4H11, etc., and Ar, are introduced through the stop valve 7 and the flowmeter 12, and mixed gas mixed with Hf iodide and the above gas are passed through the substrate 6 heated at 1050-1250 deg.C (less than liquid phase appearance temperature of the WC substrate) and HfC having a good adhesive property, is formed and continuously, the substrate 6 is heated at a temperature of 800-1050 deg.C and then, HfC coating is formed in two-step temperature.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2919379A JPS55122869A (en) | 1979-03-13 | 1979-03-13 | Coating method for hafnium carbide (hfc) |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2919379A JPS55122869A (en) | 1979-03-13 | 1979-03-13 | Coating method for hafnium carbide (hfc) |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55122869A true JPS55122869A (en) | 1980-09-20 |
JPS6215634B2 JPS6215634B2 (en) | 1987-04-08 |
Family
ID=12269356
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2919379A Granted JPS55122869A (en) | 1979-03-13 | 1979-03-13 | Coating method for hafnium carbide (hfc) |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55122869A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106826108A (en) * | 2016-12-26 | 2017-06-13 | 常熟市惠机电有限公司 | A kind of preparation method of high temp.-resistant valve connector |
-
1979
- 1979-03-13 JP JP2919379A patent/JPS55122869A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106826108A (en) * | 2016-12-26 | 2017-06-13 | 常熟市惠机电有限公司 | A kind of preparation method of high temp.-resistant valve connector |
Also Published As
Publication number | Publication date |
---|---|
JPS6215634B2 (en) | 1987-04-08 |
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