JPS55121252A - Lead-out electrode construction for ion source - Google Patents

Lead-out electrode construction for ion source

Info

Publication number
JPS55121252A
JPS55121252A JP2869679A JP2869679A JPS55121252A JP S55121252 A JPS55121252 A JP S55121252A JP 2869679 A JP2869679 A JP 2869679A JP 2869679 A JP2869679 A JP 2869679A JP S55121252 A JPS55121252 A JP S55121252A
Authority
JP
Japan
Prior art keywords
electrode
shiftably
axially
diametrically
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2869679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6127879B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shoji Isobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2869679A priority Critical patent/JPS55121252A/ja
Publication of JPS55121252A publication Critical patent/JPS55121252A/ja
Publication of JPS6127879B2 publication Critical patent/JPS6127879B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Plasma Technology (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2869679A 1979-03-14 1979-03-14 Lead-out electrode construction for ion source Granted JPS55121252A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2869679A JPS55121252A (en) 1979-03-14 1979-03-14 Lead-out electrode construction for ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2869679A JPS55121252A (en) 1979-03-14 1979-03-14 Lead-out electrode construction for ion source

Publications (2)

Publication Number Publication Date
JPS55121252A true JPS55121252A (en) 1980-09-18
JPS6127879B2 JPS6127879B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-27

Family

ID=12255632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2869679A Granted JPS55121252A (en) 1979-03-14 1979-03-14 Lead-out electrode construction for ion source

Country Status (1)

Country Link
JP (1) JPS55121252A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5778800A (en) * 1980-11-04 1982-05-17 Hitachi Ltd Ion source for netral particle incident device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
REV SCI INSTRUM=1978M4 *
SEVENTH SYMPOSIUM ON ENGINEERING PROBLEMS OF FUSION RESEARCH=1977M10D25-28 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5778800A (en) * 1980-11-04 1982-05-17 Hitachi Ltd Ion source for netral particle incident device

Also Published As

Publication number Publication date
JPS6127879B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-27

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